July 12-14, 2016
San Fransisco, CA
Resistivity and concentration vs depth measurements.
Solecon Laboratories is a specialized analytical laboratory providing dopant profiling services to the semiconductor manufacturing industry. Our expertise is in Spreading Resistance Analysis (SRA). We provide front end process engineers with timely and cost-effective characterization of resistivity and concentration vs depth profiles in silicon and germanium, with resolutions down to the nanometer range. SRA is especially useful for its depth accuracy (+/-3%) and sensitivity to ultra low dopant concentrations. SRA is helpful for checking the results of any resistivity altering process, and is used extensively for, epitaxial deposition - thickness, resistivity, auto doping issues, ion implant verification after activation, dopant contamination, diffusions in general - deep or shallow.
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