Hitachi Metals - Fine Flow Service

1920 Zanker Road
Suite 10
San Jose,  CA  95112

United States
  • Booth: 567

Hitachi Metals welcoming you to Semicon West 2018!

Hitachi Metals - Fine Flow Service (FFS)a division of the Hitachi Metals America - WARD Manufacturing LLC, a US based Hitachi Metals Group Company which specialize on Mass Flow Controller (MFC) and Vapor Deliver System (VDS)/Vaporizer that can deliver pure vapor for H2O, TEOS, TMA, SiCl4, HCD (Si2cl6) TDMAS, BTBAS, TMCTS, TiCl4, 3DMAS, HMDSO and other precursor materials with High-K process.  Our MFC knowledge and technical expertise dating back to the year of 1993.  We understands the requirements and the sense of urgency to both Semiconductor and industrial industry.  Fine Flow Service is the authorized Hitachi Metals' company to sell both Hitachi SAM® brand and AERA® brand MFC in Northern America, and we also can provide quick turn service for Hitachi MFC repair or recalibration.

Please visit booth #2211 for our latest flow control equipment such as 0.3 sec response EtherCat MFC, Pressure based MFC,  Ultra High Temperature MFC which can runs up to 200and our VDS pure vapor system.

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