HORIBA Instruments Inc.

430 Indio Way
Sunnyvale,  CA  94085

United States
  • Booth: 1233

Visit the global leader in process metrology and control

HORIBA is a global group of companies that provides analytical and measurement equipment in Semiconductor and other industries.  We are a global leader in process metrology and control and we are expanding our business operations by leveraging our advanced technological capabilities and global network.  Our Semiconductor product offering ranges from gas and liquid flow components to particle detectors for CMP and complex concentration monitoring equipment.  Visit our booth #1233 to see the latest in our application-based product development that supports the next generation of process requirements for Semiconductor manufacturing. Click here to learn more!


  • HORIBA Viewsizer 3000
    Nanoparticle Size Analyzer ...

  • The ViewSizer™ 3000 is a true breakthrough in Nanoparticle Tracking Analysis.

    As with conventional NTA, the instrument visualizes scattering from individual nanoparticles in suspension. This data is then used to determine particle movement and infer particle size using the Stokes-Einstein relationship. Then, by using the known illuminated and imaged sample volume, particle number concentration is readily determined. Thus, from a single measurement, two critical pieces of information are determined: particle size distribution and particle concentration.

    By incorporating three variable light sources (blue, green and red) the instrument is able to select the optimum conditions for any sample analysis, overcoming the limitations of NTA when analyzing a polydisperse sample and enabling a much larger range of particle sizes to be visualized.


    • High-resolution particle size distribution and visualization
    • Wide range of particle sizes in the same sample
    • Multiple light sources
    • Perfect for monitoring nanoparticle kinetics

    Click here to learn more

  • VG-200
    Self-temperature Regulating Capacitance Diaphragm Gauge...

  • Believed to be one of the smallest capacitance diaphragm gauges of its kind in the world, the VG-200’s temperature regulation is achieved through internal heating, which prevents gases condensing within the unit and potentially affecting pressure readings. It also minimizes the risk of corrosion, all of which contributes to accuracy, repeatability, and robustness. In addition, whereas competitive solutions tend to be cylindrical, the VG-200 is a quadrangular prism, which makes it easier to handle. Its case is manufactured using the impact molding technique, to produce a single-piece robust case without seams or screws. Manufactured in Japan, HORIBA’s VG-200 capacitance manometers afford high performance and stability, have adjustable temperature ranges, an analog 0 to 10V output (across full-scale), a ‘one push to re-zero’ function, and are CE and RoHS compliant.

    Click here to learn more

  • LEM-CT
    Real-Time Interferometric Process Monitor [CCD] Laser Interference Camera with motorized XY Stage...

  • Our Real-Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process.

    Interference occurs when monochromatic light hits the sample surface, resulting in different optical path lengths due to film thickness and height variations in the film. This system calculates the etching and coating speed of the monitored area by monitoring the interference intensity based on the cycle, leading to detection of the end-point from the prescribed film thickness and trench depth. Based on this theory, this system is extremely stable and can be used with complex multi-layer films.

    Two types of lasers are available and compatible with a broad range of films including SiN, SiO2, GaAs, InP, AlGaAs, and GaN.

    Click here to learn more

 Additional Info

New Exhibitor:
New Products:
Displaying Equipment:
Product Demonstrations:
Please indicate which industries/technologies your company serves
LED/solid state lighting, MEMS, Photovoltaic, Plastic/organic/flexible electronics, Power Semiconductors, Semiconductor, Flexible and Printed Electronics-, Sensors

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".

For Technical Support with this webpage, please contact support.