AGS Plasma Systems, Inc.

TT-100/150™– Bench-Top Laboratory Systems

MPS-150™– 2-6” Wafer & up to 120mm TFT

MPS-200™– 200mm Wafer & up to 175mm TFT

MPS-300™– 300mm Wafer & up to 200mm TFT

MPS-450™– 450mm Wafer & up to 300mm TFT

MPS-PM – OEM RIE/CVD Process Modules
MPS Series – Features

• Modular Design

• Ease of Maintenance

• Single or Dual Chamber

• Batch or Single Substrate

• Small Foot Print

• Stainless Steel or Aluminum

• Cost Effective Process Solution

The Penta-PVD series is a compact and highly flexible range  of deposition systems which allow the user complete freedom to reconfigure the equipment to suit their current experimental needs or for a future change of direction. The system can be purchased at the most basic level and later upgraded to a sophisticated deposition and analysis tool as funds allow. All upgrades are designed to be simple for users to implement, cutting down on unnecessary installation expense.

Available sources include Sputter, E-Beam , Low Temperature Organic and Thermal Evaporation. Options available such as; quartz crystal monitoring, RGA, OES, and heated, cooled, rotating or static sample stages.

TYPICAL APPLICATIONS

•Sample preparation

•R & D development of new coatings

•Electrical contacts

•Sputter deposition

•Teaching and training

•Lift-off

Conceived to enable creativity and design flexibility in vacuum chamber system construction. Cubes can be stacked together into various shapes and configurations, with interchangeable plates offering a variety of features for connections, windows, and feedthroughs. Plates include a standard 1" optical pattern for easy connection of hinges, posts, mounts, lenses, polarizers, and other accessories.

TYPICAL APPLICATIONS