AGS Plasma Systems, Inc.

3064 Kenneth Street
Santa Clara,  CA  95054

United States
  • Booth: 268

AGS Plasma Systems used for etching and deposition.

Celebrating our 31st Year in Plasma!

AGS Plasma Systems, Inc. Transforming Technology into Solutions

3064 Kenneth St., Santa Clara, CA 95054  USA

Tel: 408-855-8686

Now offering the Ideal Vacuum Cube Range and introducing the Penta-PVD series of modular deposition system!


MPS Series - Plasma Etching & Deposition Features - Modular Design for Ease of Maintenance - Single or Dual Chamber Batch or Single Substrate - Small Foot Print - Stainless Steel or Aluminum Process Chambers - Cost Effective Process Solution - Automatic Process Controll using Windows® Manual  load or a variety of vacuum  load  locks are available.
OEM module to integrate to existing system platforms.

Our Modular Process System offers the ultimate machine for thin film research and development through production. Advanced Reactor technologies, such as ICP, RIE, RIE/PE, PECVD and PVD are available as standard modules. Manual load or a variety of vacuum load locks are available. OEM modules to integrate to your existing system platforms.


  • MPS Range of Plasma Processors
    The classic, high performance, value priced, plasma tools used throughout the world for over ten years - and still going strong! ...

  • TT-100/150™– Bench-Top Laboratory Systems

    MPS-150™– 2-6” Wafer & up to 120mm TFT

    MPS-200™– 200mm Wafer & up to 175mm TFT

    MPS-300™– 300mm Wafer & up to 200mm TFT

    MPS-450™– 450mm Wafer & up to 300mm TFT

    MPS-PM – OEM RIE/CVD Process Modules
    MPS Series – Features

    • Modular Design

    • Ease of Maintenance

    • Single or Dual Chamber

    • Batch or Single Substrate

    • Small Foot Print

    • Stainless Steel or Aluminum

    • Cost Effective Process Solution

    • Windows® Process Controller
  • Hex & Penta - PVD™
    Versatile coating system for thin film research and development ...

  • The Penta-PVD series is a compact and highly flexible range  of deposition systems which allow the user complete freedom to reconfigure the equipment to suit their current experimental needs or for a future change of direction. The system can be purchased at the most basic level and later upgraded to a sophisticated deposition and analysis tool as funds allow. All upgrades are designed to be simple for users to implement, cutting down on unnecessary installation expense.

    Available sources include Sputter, E-Beam , Low Temperature Organic and Thermal Evaporation. Options available such as; quartz crystal monitoring, RGA, OES, and heated, cooled, rotating or static sample stages.


    •Sample preparation

    •R & D development of new coatings

    •Electrical contacts

    •Sputter deposition

    •Teaching and training


  • Ideal Vacuum Cube
    Modular High-Vacuum Chamber System ...

  • Conceived to enable creativity and design flexibility in vacuum chamber system construction. Cubes can be stacked together into various shapes and configurations, with interchangeable plates offering a variety of features for connections, windows, and feedthroughs. Plates include a standard 1" optical pattern for easy connection of hinges, posts, mounts, lenses, polarizers, and other accessories.


    •Vacuum Ultraviolet (VUV) Devices and Experiments
    •Thermal Vacuum & Altitude Testing
    •Vacuum Degassing Chamber
    •High Power and Ultra Short Pulsed Lasers Research and Development
    •Ion Acceleration & Beamlines
    •RGA (Residual Gas Analyzers), Spectroscopy, Molecular Ion Trap
    •Helium Leak Testing of Hermetic Sealed Devices With Welded In Helium Atmosphere
    •Leak Detection Of Pharma Packaging
    Cryostat Vacuum Chamber

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