Ushio, Inc.

1-6-5 Marunouchi Chiyoda-ku
Marunouchi Kitaguchi Bldg.
Tokyo,  100-8150

  • Booth: 665

Established in 1964, USHIO INC. (TOKYO: 6925) is a leading manufacturer of light sources such as lamps, lasers, and LEDs, in a broad range from ultraviolet to visible to infrared rays, as well as optical equipment and cinema-related products that incorporate these light sources. 

USHIO exhibits UX-series exposure systems and Excimer UV surface treatment systems.


  • UX-4 Full-Field Projection Aligner
    Full-field, single-shot projection exposure system ...

  • Original light source and other optical technology developed by Ushio for many years. 
    Provides one-shot exposure for up to 8-inch wafers without touching the mask. 
    Well-experienced with optional backside alignment function.
    Those technologies such as a one-shot exposure system and large depth-of-focus enable higher productivity than proximity aligners.
  • UX-5 Step & Repeat Lithography Tool
    Well experienced exposure stepper system for advanced packaging....

    • L/S 5 μm patterning can be formed on a maximum of 510x610mm substrate.
    • We have also suitable tools for exposing solder resist using an i/h-line light source.
    • UX-5 tools provide high productivity manufacturing by large shot area (4 shots per full panels), by the large depth of focus, and by auto-scaling function for panel shrinkage.
  • Excimer UV Lamp
    Surface treatment system for advanced packages and high-frequency substrates, capable of improving adhesion strength without anchoring....

  • Application:

    • Improved adhesive strength (PI/ LCP/ Expoxy, etc.)
    • Organic cleaning (before PCB shipment / alternative to alkaline cleaning)

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