This product reviews defects of semiconductor integrated circuits detected by AVI / AOI at front end processing.
Seiwa original high resolution optical engine onboard with Seiwa designed chassis attains high throughput with high precision inspection. Customized system is available.
- Wafer size: 8 inch / 12 inch
- Work condition: Dicing ring or Frame ring
- Wafer handling: Robot (Cassette or Load Port Station)
- Motion Speed: Max 1000mm / sec
- Acceleration / Deceleration 0.1sec
- *2x faster (for 300mm case)
- *Anti-vibration countermeasure applied
- Cleanliness: ISO 14644-1 Class 3~ integrated FFU (ULPA)
SRV Series Seiwa original review Engine (For Review)
Camera: 5M pixel
Lenses: 2.5x, 10x, 20x, 50x, 100x