Harmonic Drive LLC

42 Dunham Ridge
Beverly,  MA  01915

United States
http://www.harmonicdrive.net
  • Booth: 251


We look forward to seeing you!

Harmonic Drive is a world leader in the design, development and manufacturing of zero-backlash motion control products. Our servo-actuators, gearheads, and gear components achieve accuracy better than 30 arc-seconds and repeatability of +/- 5 arc-seconds. A wide variety of standard and customized designs are available to meet the high precision requirements of semiconductor manufacturing equipment and robotics. Application engineers with expertise in motion control are available to assist you with your concept and detailed designs, free of charge. Harmonic Drive® products are used extensively in wafer and flat panel transfer robots as well as CMP and ion implant equipment. Our products provide the highest torque density of any product in its class and are available in sizes ranging from 13mm to 330mm in diameter. Our US Headquarters and manufacturing facility in Massachusetts, is ISO 9001 and AS9100 registered and produces the majority of products we sell.


 Press Releases

  • Ultra-Lightweight Gear Units from Harmonic Drive LLC

    New gear units boast ultra-thin profile and extreme lightweight.

    Beverly, MA, October 21, 2021, -- Harmonic Drive LLC, a leader in high precision motion control announces new ultra-lightweight series gearheads. The five new models are 50% lighter than the standard versions.  

    This series features a newly engineered lightweight structure with an ultra-compact shape. The ULW line maintains the same performance standards as the CSF-2UH series. Ideal for use on end of arm axes for small industrial and collaborative robots, the CSF-ULW is also well suited for general industrial machinery where weight is a critical factor. CSF-ULW gears are available five sizes and six reduction ratios

    CSF-2UH-ULW:

    •  Zero backlash
    • High accuracy
    • Ultra-lightweight, mass: .09kg ~ .45kg
    • Super flat configuration, 19mm ~ 31.5mm
    • Outer diameter: φ 54mm (size 8) ~ 93mm (size 20)
    • Reduction Ratios 30:1~160:1
    • Available in 5 sizes

    Known for its expert engineering and high-precision manufacturing, Harmonic Drive LLC products are relied upon every day for precision motion control.

    About Harmonic Drive LLC

    Harmonic Drive LLC engineers and manufactures precision Harmonic Drive® servo actuators, gearheads and gear component sets.  They work with industry-leading customers and companies of all sizes to provide both standard product and custom-engineered servo actuators, gearheads and gear components. Harmonic Drive LLC provides high precision, high performance solutions to meet customer’s mission critical application requirements. The majority of the products sold by HDLLC are proudly made at their US headquarters and manufacturing facility in Massachusetts. Harmonic Drive LLC is AS9100 and ISO 9001 registered. Affiliated companies in, Japan (Harmonic Drive Systems, Inc.) and Germany (Harmonic Drive SE) provide additional manufacturing capabilities.

    With over 50 years of experience, our expert engineering and production teams develop enabling technologies and products to meet the needs of an evolving motion control market. We are very proud of our outstanding company history. Our high-precision, zero-backlash Harmonic Drive® gears and Harmonic Planetary® gears have, and continue to play critical roles in robotics, spaceflight applications, semiconductor manufacturing equipment, factory automation equipment, medical diagnostics and surgical robotics. More information can be found by visiting the company’s website at www.harmonicdrive.net

    Harmonic Drive is a registered trademark of Harmonic Drive Systems.

  • New Actuator with Integrated Servo Drive from Harmonic Drive

    Beverly, MA, October 21, 2021--- Harmonic Drive LLC, the leader in high precision motion control adds a new compact actuator with an integrated servo drive to its product portfolio. The RSA-8 with an integrated drive does not require a separate external servo drive which greatly simplifies cabling and reduces cabinet space requirements.

    Featuring a CSF-1U-CC compact, zero-backlash gearhead, the RSA-8A integrated actuator provides high torque, exceptional accuracy and repeatability.  The compact shape and low mass make it ideal for use in robotics. The RSA-IDT Actuator fits between the latest products released, RSF-IDT and FHA-IDT actuators, both in terms of size and specifications. This new actuator perfectly augments Harmonic Drive’s growing line of integrated actuators.  Like all of the Integrated Actuators from Harmonic Drive LLC, it communicates via CANopen, and only requires 4 conductors: CANH, CANL, +24VDC, 0VDC. A single-turn 14bit (16384 cpr) gear output sensing encoder has been integrated.

    Key Features:

    • Actuator + Integrated Servo Drive utilizing CANopen communication conforming to DS402 and DS301
    • 24VDC Nominal +7 to 30VDC Supply Voltage Range
    • Single Axis BLDC Motor Controller/Driver with CAN & TTL-UART Interface
    • Field Oriented Control
    • Single Cable with only 4 conductors needed: CANH, CANL, +24VDC, 0VDC
    • Zero Backlash
    • Shaft or Flange output available
    • Pigtail Connectors with 4 exit options
    • 14bit (16384 cpr) resolution motor encoder
    • Control Modes Including Torque, Velocity, and Position Control, CSP, CSV, CST
    • Harmonic Drive HDL Software for initial tuning, commissioning, and analysis
    • Homing modes include: single-ended, double-ended, double-ended with 16bit autoscale hardstop homing or teachable position

    The RSA-8A-IDT Miniature actuator with an integrated servo drive is one of the latest products developed by our USA-based engineering group at Harmonic Drive LLC in Massachusetts. The RSA joins the recently released family of FHA-Mini integrated actuators.

    About Harmonic Drive LLC

    Harmonic Drive, LLC engineers and manufactures precision servo actuators, gearheads and gear component sets. We work closely with academia, Fortune 500 and companies of all sizes to understand their application requirements and provide a standard or, in most cases, a custom-engineered solution to enable the success of their design project. The majority of the products sold by Harmonic Drive LLC are proudly made at our manufacturing facility in Massachusetts. The Harmonic Drive Group Companies are comprised of Harmonic Drive, LLC (United States), Harmonic Drive Systems, Inc. (Japan) and Harmonic Drive SE (Germany). We have shared core values, product designs and quality standards. State of the art manufacturing facilities in the US, Japan and Germany enables us to locally serve the needs of our global customers providing both custom-engineered solutions and standard products.

    With over 50 years of experience, our expert engineering and production teams develop enabling technologies and products to meet the needs of an evolving motion control market. We are very proud of our outstanding company history. Our high-precision, zero-backlash Harmonic Drive® gears and Harmonic Planetary® gears have, and continue to play critical roles in robotics, spaceflight applications, semiconductor manufacturing equipment, factory automation equipment, medical diagnostics and surgical robotics. More information can be found by visiting the company’s website at www.harmonicdrive.net

    Harmonic Drive is a registered trademark of Harmonic Drive Systems. CANopen is a registered trademark of CAN in Automation

  • Harmonic Drive LLC announces new mini actuator with Integrated Servo Drive

    Peabody, MA, October 21, 2021--- Harmonic Drive LLC, the leader in high precision motion control announces new FHA mini actuators with an integrated servo drive. This evolutionary product eliminates the need for an external drive and greatly improves wiring while retaining high-positional accuracy and torsional stiffness in a compact housing.

    The FHA-C Mini Series is a family of extremely compact actuators that deliver high torque with exceptional accuracy and repeatability. As part of the FHA-C Mini family, an integrated servo drive version utilizing CANopen® communication is now available. Since it communicates via CANopen, only 4 wires are needed: CANH, CANL, +24VDC, 0VDC. A single-turn 14bit (16384 cpr) gear output sensing encoder has been integrated along with a single-turn 15bit (32768 cpr) motor input sensing encoder providing a true absolute encoder that does not require a battery within 360° of rotation of the output.

    Our engineering team incorporated more features and capabilities without greatly impacting the size and mass of the actuator.

    Key Features:

    • Actuator + Integrated Servo Drive utilizing CANopen communication
    • 24VDC Nominal +7-28VDC Supply Voltage Range
    • Single Cable with only 4 wires needed: CANH, CANL, +24VDC, 0VDC
    • Zero Backlash
    • Dual Absolute Encoders
    • Panel Mount Connectors with 4 exit options
    • Output Sensing Encoder 14bit (16384 cpr) resolution
    • Input Sensing Encoder 15bit (32768 cpr) resolution
    • Control Modes Including Torque, Velocity, and Position Control, CSP, CSV, CST
    • Harmonic Drive HDL Software

    The FHA-C Mini series actuators with an integrated servo drive are among the latest products developed at HDLLC in Peabody, MA.

    About Harmonic Drive LLC

    Harmonic Drive, LLC engineers and manufactures precision servo actuators, gearheads and gear component sets. We work closely with both Fortune 500 and companies of all sizes to understand their application requirements and provide a standard or, in most cases, a custom-engineered solution to enable the success of their design project. The majority of the products sold by Harmonic Drive, LLC are proudly made at our manufacturing facility in Peabody, Massachusetts. The Harmonic Drive Group Companies are comprised of Harmonic Drive, LLC (United States), Harmonic Drive Systems, Inc. (Japan) and Harmonic Drive AG (Germany). We have shared core values, product designs and quality standards. State of the art manufacturing facilities in the US, Japan and Germany enables us to locally serve the needs of our global customers providing both custom-engineered solutions and standard products.

    With over 50 years of experience, our expert engineering and production teams develop enabling technologies and products to meet the needs of an evolving motion control market. We are very proud of our outstanding company history. Our high-precision, zero-backlash Harmonic Drive® gears and Harmonic Planetary® gears have, and continue to play critical roles in robotics, spaceflight applications, semiconductor manufacturing equipment, factory automation equipment, medical diagnostics and surgical robotics. More information can be found by visiting the company’s website at www.harmonicdrive.net

    Harmonic Drive is a registered trademark of Harmonic Drive Systems.


 Products

  • RSF-B Integrated Rotary Actuator
    Supermini actuator with an integrated servo drive utilizing CANopen® communication. Features a single cable connection with only 4 conductors needed: CANH, CANL, +24VDC, 0VDC....

  • The compact RSF-5 miniature actuator with a zero backlash Harmonic Drive® gear delivers high torque with exceptional accuracy and repeatability. The actuator features an integrated servo drive utilizing CANopen® communication. This evolutionary product eliminates the need for an external drive and greatly improves wiring while retaining high-positional accuracy and torsional stiffness in a compact housing. This new miniature actuator product is ideal for use in robotics.

    Since it communicates via CANopen, only 4 conductors are needed: CANH, CANL, +24VDC, 0VDC. A single-turn 14bit (16384 cpr) absolute encoder has been integrated. 

    Key Features:

    • Actuator + Integrated Servo Drive utilizing CANopen communication conforming to DS402 and DS301

    • 24VDC Nominal +7 to 30VDC Supply Voltage Range

    • Single Axis BLDC Motor Controller/Driver with CAN & TTL-UART Interface

    • Field Oriented Control

    • Single Cable with only 4 conductors needed: CANH, CANL, +24VDC, 0VDC

    • Zero Backlash

    • Pigtail Connectors with 2 exit options

    • 14bit (16384 cpr) resolution motor encoder

    • Control Modes Including Torque, Velocity, and Position Control, CSP, CSV, CST

    • Harmonic Drive HDL Software for initial tuning, commissioning, and analysis

    • Homing modes include: single-ended, double-ended, double-ended with 16bit autoscale hardstop homing or teachable position

    Options:

    • Flex-rated extension cables with sealed connectors

  • FHA-IDT Actuator with Integrated Servo
    Mini actuator with an integrated servo drive utilizing CANopen® communication. Features a single cable connection with only 4 conductors needed: CANH, CANL, +24VDC, 0VDC....

  • The FHA-C mini Series is a family of extremely compact actuators that deliver high torque with exceptional accuracy and repeatability. As part of the FHA-C mini family, an integrated servo drive version utilizing CANopen® communication is now available. This evolutionary product eliminates the need for an external drive and greatly improves wiring while retaining high-positional accuracy and torsional stiffness in a compact housing. This new mini actuator product is ideal for use in robotics.

    Since it communicates via CANopen, only 4 conductors are needed: CANH, CANL, +24VDC, 0VDC. A single-turn 14bit (16384 cpr) gear output sensing encoder has been integrated along with a single-turn 15bit (32768 cpr) motor input sensing encoder providing a true absolute encoder that does not require a battery within 360° of rotation of the output. Typical multi-turn encoders monitoring the motor input shaft require a battery to store the current position when power is lost to the system; however, the dual absolute encoders overcome this need. In other words, No Battery Required. When power is restored, the actuator knows its position.

    Good Robot Award, Innovation

    Key Features:

    • Actuator + Integrated Servo Drive utilizing CANopen communication
    • 24VDC Nominal +7 to 28VDC Supply Voltage Range
    • Single Cable with only 4 conductors needed: CANH, CANL, +24VDC, 0VDC
    • Zero Backlash
    • Dual Absolute Encoders
    • Panel Mount Connectors with 4 exit options
    • Output Sensing Encoder 14bit (16384 cpr) resolution
    • Input Sensing Encoder 15bit (32768 cpr) resolution
    • Control Modes Including Torque, Velocity, and Position Control, CSP, CSV, CST
    • Harmonic Drive HDL Software for initial tuning, commissioning, and analysis

    About Harmonic Drive LLC
    Harmonic Drive LLC engineers and manufactures precision Harmonic Drive® servo actuators, gearheads and gear component sets.  They work with industry-leading customers and companies of all sizes to provide both standard product and custom-engineered servo actuators, gearheads and gear components. Harmonic Drive LLC provides high precision, high performance solutions to meet customer’s mission critical application requirements. The majority of the products sold by HDLLC are proudly made at their US headquarters and manufacturing facility in Massachusetts. Harmonic Drive LLC is AS9100 and ISO 9001 registered. Affiliated companies in, Japan (Harmonic Drive Systems, Inc.) and Germany (Harmonic Drive SE) provide additional manufacturing capabilities. 

    With over 50 years of experience, our expert engineering and production teams develop enabling technologies and products to meet the needs of an evolving motion control market. We are very proud of our outstanding company history. Our high-precision, zero-backlash Harmonic Drive® gears and Harmonic Planetary® gears have, and continue to play critical roles in robotics, spaceflight applications, semiconductor manufacturing equipment, factory automation equipment, medical diagnostics and surgical robotics. More information can be found by visiting the company’s website at www.harmonicdrive.net
    Harmonic Drive is a registered trademark of Harmonic Drive Systems.

  • SHA Rotary Actuator
    Hollow shaft actuator with a compact outer diameter and exceptional torque/volume ratio. Peak torque 73~3419 Nm, Max speed 17.4~117.6....

  • SHA-SG Rotary Actuator
    SHA-SG Series AC Servo Actuators provide high torque and highly accurate rotary operation.
    These hollow shaft servo actuators utilize Harmonic Drive® precision strain wave gears combined with a brushless servomotor and magnetic absolute encoder. The SHA Series is an advanced version of the FHA series AC Servo Actuators, featuring a larger hollow shaft with a smaller, outside diameter. The SHA Series is designed to operate with industry servo drives, as well as REL Series and HA-800 drive from Harmonic Drive.

    Key Features:

    • High torque
    • Compact, slim design
    • Large center through hole
    • Low voltage winding, 20VDC to 90VDC available for sizes 20, 25, 32.
    • Connects directly with Mitsubishi Electric’s MELSERVO-J4 SSCNETⅢ/H 
    • Connects directly with Σ-7 servo drives from Yaskawa, see brochure
    • Connects directly with MINAS A5II/A5IIN series from Panasonic
    • Also available to order as a motor only
    • NEW, size 45 added to the lineup
    • Safety Standard: EN60034-1:2010, EN60034-5

    About Harmonic Drive LLC
    Harmonic Drive LLC engineers and manufactures precision Harmonic Drive® servo actuators, gearheads and gear component sets.  They work with industry-leading customers and companies of all sizes to provide both standard product and custom-engineered servo actuators, gearheads and gear components. Harmonic Drive LLC provides high precision, high performance solutions to meet customer’s mission critical application requirements. The majority of the products sold by HDLLC are proudly made at their US headquarters and manufacturing facility in Massachusetts. Harmonic Drive LLC is AS9100 and ISO 9001 registered. Affiliated companies in, Japan (Harmonic Drive Systems, Inc.) and Germany (Harmonic Drive SE) provide additional manufacturing capabilities. 

    With over 50 years of experience, our expert engineering and production teams develop enabling technologies and products to meet the needs of an evolving motion control market. We are very proud of our outstanding company history. Our high-precision, zero-backlash Harmonic Drive® gears and Harmonic Planetary® gears have, and continue to play critical roles in robotics, spaceflight applications, semiconductor manufacturing equipment, factory automation equipment, medical diagnostics and surgical robotics. More information can be found by visiting the company’s website at www.harmonicdrive.net
    Harmonic Drive is a registered trademark of Harmonic Drive Systems.


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