SEMICONDUCTOR WAFER
Type: Silicon, Glass, Quartz
Size: 2"~18"
THIN FILM & PATTERNING:
Oxides: PE-TEOS, LPCVD-TEOS, HDP, USG, PSG, BPSG
Metal & Alloys (PVD and Evaporation)- Cu, Al & Al alloys, Ta, W, WN, Ti, Pt, Ru, Au
Nitride: SiN, TiN, TaN etc
Polysilicon: (Doped/Undoped)
Photoresist, SOG & SOD, ArF, KrF
Masks: For Calibration, Metrology, CMP and so on. (Consult for any specific requirement)
SPUTTERING TARGETS & EVAPORATION MATERIALS
High purity metals and alloys (Precious and Rare Earth Metals)
Oxide and Fluoride Targets
Conductive & Insulating Films
Flat and rotatable configurations