July 12-14, 2016
San Fransisco, CA
Advanced materials solutions: interface, heaters, e-chucks
Fralock (USA, ISO) is a design, engineering and manufacturing company of specialty components and sub-assemblies for Semiconductor Wafer Fabrication Equipment manufacturers. We have built our reputation by developing high performance solutions for high value problems specifically focused upon maintaining Thermal Uniformity. In chamber applications include: Multi-Zone Heaters, Electro-Static Chucks, Plasma Resistant Shims, Shower Head Gaskets, Thermal Interface Materials, and Edge Ring Sub-Assemblies. Fralock’s unique manufacturing capabilities includes our All-Polyimide Adhesiveless Lamination technology. Fralock offers comprehensive product development and product realization services by leveraging extensive materials and process knowledge gained over the last 50 years. Through early engagement during product development we are able to improve the performance, reliability and durability of our customer’s processes and products thereby extending their competitive advantage.