Cast Aluminum Solutions LLC

1310 Kingsland Drive
Batavia,  IL  60510

United States
  • Booth: 1439

Chamber Heaters + Solvent & Gas Heaters for Wafer Processing

Cast Aluminum Solutions (CAS) designs & manufactures precision-engineered thermal components for semiconductor equipment OEMs and end-users worldwide.  We specialize in heated devices for wafer processing applications.

CAS is a leading supplier of high-uniformity Pedestal Heaters.  Advanced options include Multi-Zone Heating, High-Temperature High-Uniformity Platens, Embedded Cooling Tubes, Integrated Gas Channels, and Precision Surface Finishes.

CAS innovations include: High-Purity Gas Delivery Heaters (PUR-Therm) and PUR-X Inline Heaters (featuring replaceable PFA flow-tubes).

Supported by a newly-expanded R&D Technical Center, CAS develops, tests and manufactures high-performance heating & cooling products for critical in-chamber applications as well as specialized inline heaters for wet bench processes.

Customers view us as “an extension of their own engineering teams.”

Headquartered near Chicago, Cast Aluminum Solutions serves customers globally via offices throughout North America, Europe and Asia.

At Semicon West 2019, please visit the CAS Team in the South Hall at Booth 126 !


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