ULVAC is a leading supplier of production equipment for the semiconductor, FPD and solar cell industries. Semiconductor Products include the MEMS Release Equipment, the ENTRON Metallization System with PVD/CVD/ALD capability, etching systems for various applications including solutions for LED, Power Device and Non-Volatile memory. Also on display will be vacuum components including the leak detectors, RGA’s and ellipsometers. An area of the booth will also feature our Solar Cell processing equipment. The systems and components are manufactured to RoHS compliance and are designed with innovative production technology for cost effective device fabrication. Systems range from R&D through full-scale manufacturing applications.