Product Highlights MLA150
Perfect for Multiuser Facilities
Training <1 h to fully qualify as a user.
Fast and Accurate Alignment
250 nm front alignment, backside alignment, alignment error compensation.
2 lasers can be installed simultaneously on the same system to expose the whole range of photoresists.
Low Operation Costs and Easy Maintenance
10-20 years of laser lifetime.
No mask-related costs, effort, or security risks.
For simple 2.5D structures.
Edge roughness 60 nm; CD uniformity 100 nm; 40 nm address grid; autofocus compensation for warped/corrugated substrates.
Specifically designed software and workflow make the tool operation fast and easy.
150 mm wafer in <16 min with 405 nm laser.