July 12-14, 2016
San Fransisco, CA
Visit KLA at SEMICON West booth #1327
Surface Profiling, nanomechanical testing and thin film metrology for a better level of understanding
KLA Corporation is a leading supplier of process control and yield management solutions for the semiconductor and related nanoelectronics industries. KLA’s products and services are used by bare wafer, IC, reticle and other manufacturers of materials and equipment around the world, from research and development to final volume manufacturing. Products and services include inline unpatterned and patterned wafer defect inspection, review and classification; reticle defect inspection and metrology; packaging inspection and die sort; critical dimension (CD) metrology; pattern overlay metrology; film thickness, surface topography and composition measurements; measurement of in-chamber process conditions; wafer shape and stress metrology; computational lithography tools; and, overall yield and fab-wide data management and analytics.