AGS Plasma Systems used for etching and deposition.
Celebrating our 30th Year in Plasma!
AGS Plasma Systems, Inc. Transforming Technology into Solutions
3064 Kenneth St., Santa Clara, CA 95054 USA
Now offering the Ideal Vacuum Cube Range and introducing the Penta-PVD series of modular deposition system!
PLASMA • ETCH • PVD • PECVD • HDP • CLUSTER
MPS Series - Plasma Etching & Deposition Features - Modular Design for Ease of Maintenance - Single or Dual Chamber Batch or Single Substrate - Small Foot Print - Stainless Steel or Aluminum Process Chambers - Cost Effective Process Solution - Automatic Process Controll using Windows® Manual load or a variety of vacuum load locks are available.
OEM module to integrate to existing system platforms.
Our Modular Process System offers the ultimate machine for thin film research and development through production. Advanced Reactor technologies, such as ICP, RIE, RIE/PE, PECVD and PVD are available as standard modules. Manual load or a variety of vacuum load locks are available. OEM modules to integrate to your existing system platforms.