AGS Plasma Systems, Inc.

3064 Kenneth Street
Santa Clara,  CA  95054

United States
http://www.agsplasma.com
  • Booth: 268

AGS Plasma Systems used for etching and deposition.

Celebrating our 30th Year in Plasma!

AGS Plasma Systems, Inc. Transforming Technology into Solutions

3064 Kenneth St., Santa Clara, CA 95054  USA

Tel: 408-855-8686/8787       

www.agsplasma.com

Now offering the Ideal Vacuum Cube Range and introducing the Penta-PVD series of modular deposition system!

PLASMA • ETCH • PVD • PECVD • HDP • CLUSTER

MPS Series - Plasma Etching & Deposition Features - Modular Design for Ease of Maintenance - Single or Dual Chamber Batch or Single Substrate - Small Foot Print - Stainless Steel or Aluminum Process Chambers - Cost Effective Process Solution - Automatic Process Controll using Windows® Manual  load or a variety of vacuum  load  locks are available.
OEM module to integrate to existing system platforms.

Our Modular Process System offers the ultimate machine for thin film research and development through production. Advanced Reactor technologies, such as ICP, RIE, RIE/PE, PECVD and PVD are available as standard modules. Manual load or a variety of vacuum load locks are available. OEM modules to integrate to your existing system platforms.


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