High-Performance Wafer Handling Automation Systems
The WaferMate300 is a highly configurable, BOLTS-compatible robotic wafer-handling platform that mates high performance with cost competitiveness. As an ISO Class-2 clean EFEM, this platform includes all applicable mini-environment components, E84 compliance, and rear hand-off.
Supports a wide range of wafer process tools & environments
Available in single and dual load port configurations
Can service up to 3 process tools at once
Adaptable for 200mm and smaller