KSM Co., Ltd.

102 Persian Drive
Sunnyvale,  CA  94089

United States
  • Booth: 561

KSM Vacuum Products, Inc. | KSM USA | KSM Corporation

For over 40+ Years KSM Co., Ltd. has custom designed and manufactured Critical Vacuum-Seal and Heating Products for UHV / Semiconductor Equipment.

  • Welded Metal Bellows
  • Ceramic & Metal/Aluminum Heaters
  • Fine Ceramics
  • Mechanical Seals

Key strategic supplier to leading SEMICONDUCTOR OEM’s across the globe. ( WFE, Solar and Flat Panel Display MarketsCapacity to meet ramp up industry demands thanks to our extensive cleanroom controlled campus facility. Proudly operating the World’s Largest Cleanroom for the Welding and Assembly of Metal Bellows. Fully equipped with in-house Automated Cleaning Systems & Metallurgical Test Labs.

Our products are precision-engineered into every step of the wafer manufacturing process- from Crystal Growing to Final Inspection/Packaging our Bellows & Higher Assemblies are used in extreme temperature and high-purity vacuum environments.     

PROCESS: Crystal Growing | Ion Implant | Etch | CVD | MBE | CMP | Lithography | Inspection | Display Flat Panel | + …

APPLICATION: Flexible Coupling | Crucible Lifts | Feedthrough | Flex-Connector | Pin Lift | Cassette Elevator | Door Valve Loadlock | Vibration Damper | Heater Lift | +…

 Press Releases

  • KSM, whose original entity name stood as an acrynmn for 'KOREA SEAL MASTER'- has grown eponentially over it's years in business. At it's core KSM is fundementally an engineering company- passionate about supplying innovative Sealing & Heating solutions to those spearheading the future of high-tech and all things wafer manufacturing.  

    Over the years, KSM's unique and continually expanding product line has kept them at the forefront of materials research innovation. Their experience supporting cutting-edge builds and cross-market applications put them at particular advantage to leverage their joint HEATING & WELDING know-how with their METAL and CERAMICs materials aptitude. It is the cocktail of these capabilities that continue to drive the entire KSM Group forward- running faithfully hand-in-hand with the most recognized names in the WFE Market.

    In light of SEMICON Korea 2019 The Elec, a South Korean Media Group- published the following piece on KSM Co., Ltd.


    KSM Group participated in Semicon Korea 2019 to exhibit innovative semiconductor equipment parts and components. Among the affiliates, KSM exhibited Metal Bellows, KSM Component exhibited heater parts, and Korea Seal Master exhibited Mechanical Seal.

    The metal bellows, which is the main source of sales of KSM Group, refers to a structure formed by forming and welding a thin sheet of 0.05mm thickness into a flexible corrugated tube. This structure is used to keep both the inside and outside of the semiconductor equipment in a vacuum sealed state. Since the semiconductor wafer is moved and processed in the equipment, metal bellows are required to distinguish between the atmospheric state and the vacuum state.

    The metal bellows should be able to move, compress, and stretch, and be used for more than one million cycles in high temperature, high pressure, and corrosive environments. KSM metal bellows is a part that global semiconductor equipment companies compete to get their hands on. Korean equipment parts companies rarely have a U.S. subsidiary and factories; KSM does.

    "KSM has the world's largest market share in the metal bellows market," said Jeong-il Kim, Executive Director of KSM. "With our proprietary automated welding robot technology, we can produce more high-quality and high-durability products than any other metal bellows company in the world,” he emphasized.

    The heater is the new growth engine of the KSM group. This product is used as a key component of chemical vapor deposition (CVD) and etching process equipment among semiconductor manufacturing equipment. The heater must be able to heat uniformly over the entire wafer area while maintaining direct contact with the silicon wafer and maintaining a minimum temperature deviation. KSM Component brazes or welds the metal with an automated system. In the case of welding, thermal deformation is small because it utilizes E beams. High productivity is the greatest competitive advantage. The development period is shortened to two weeks so that it can respond quickly to customer requests.

    Korean Seal Master presented Kalrez O-ring, a sealing product. Kalrez is made of high fluorine content and thus has higher chemical and thermal resistance than existing materials. It is applied to semiconductor and display vacuum equipment.

    Find Article: http://www.thelec.net/news/articleView.html?idxno=166


  • Welded Metal Bellows
    These precision-engineered products are the perfect solution for providing movement in response to hydraulic or pneumatic pressure inputs. The welded metal and unique shape of the mating diaphragm pairs permit them to nest in very compact spaces....

  • CUSTOM DESIGN: To meet your exact pressure, environment, and cycle life requirements.

    RANGE OF SIZES: From 0.37 in ID to 37.4 in OD for round and non-round applications. [9.5mm ~ 950mm]


    MATERIALS: All types of Stainless Steel, High Nickel and Titanium Corrosion-Resistant Alloys.

    UHV LEAK TIGHT: Hermetic sealing of all welded assemblies is assured through 100% Helium, Mass Spectrometer Testing.

    PACKAGING: ISO 6 Clean Room Processing and ISO 5 Final Inspection & Packaging ensure that the ultimate in high purity.

    WELDING: GTAW, AUTOMATED LASER , ORBITAL & ELECTRON BEAM WELDING. [To meet SAE AMS-W-6858 and AWS D17.2] *Spot Welding Available


    -Assemblies & Components: Vacuum Heat Treat, Brazing and Stress Relieving Available.

    -Hardware: Electropolish & and Special Plating Available. 

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