UNIXX SP760 - Resist spray coating system
FOR FLAT AND CONCAVE OR CONVEX SURFACES
SEMI-AUTOMATIC SPRAY COATER
The osiris spray coating system UNIXX SP760 is a innovative spray coating concept that combines two different spray methods into one system. With the newly developed method of 3D spray technology, for concave or convex (3D) surfaces, as well as the traditional in-line technology (2D) for substrates with topographic structure, we can now coat all topographies and shapes in one system.
The device has an easy to operate user interface with all needed functions. All necessary media supplies such as CDA, N2 and Vacuum can be plugged in via plug-in connections and are controlled by software.
- For flat, concave or convex surfaces
- Designed for large scale optical devices and different flat substrates sizes
- 6 axis robot system
- Up to two ultrasonic spray nozzles with automatic quick exchange function
- Integrated heating chuck
- User-friendly operator interface
Spray coater for all topographies and shapes in one system.
2D FOR ROUND WAFER SIZE
from Ø200 mm up to Ø300 mm
2D FOR SQUARE SUBSTRATE SIZE
from 9” x 9” up to 21” x 21”
3D for CONCAVE OR CONVEX SURFACES
for large scale optical devices up to 300mm high