The compact system is designed for macro inspection of bare or patterned wafers up to 200mm. In seconds, the nSpec® Macro Standalone System automatically detects and quantifies numerous defects and features of interest. The minimum defect resolution ranges from 50 to 100 microns, contingent on the field of view or wafer size.
The nSpec® Macro provides full sample illumination and the ability to individually modify the LEDs to adjust intensity, color, and location of illumination for full complete flexibility.