scia Systems GmbH

Clemens-Winkler-Str. 6c
Chemnitz,  09116

Germany
http://www.scia-systems.com
  • Booth: 267

scia Systems - Equipped for Precision

scia Systems is a full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for coating and etching processes in the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as research and development environments.

Due to their flexible and modular design, the systems can be configured according to customer specific requirements. Amongst others by combining several vacuum process chambers into cluster or in-line solutions. Together with our worldwide service partners, we offer comprehensive service and superior technology support.

Technology Portfolio

  • Ion Beam Trimming (IBT)
  • Ion Beam Etching and Milling (IBE/IBM)
  • Dual Ion Beam Sputtering (DIBS)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Reactive Ion Etching (RIE)
  • Magnetron Sputtering
  • Dry Cleaning


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