Typical Ingot Diameter : 12inch Semiconductor Grower (Superconducting Magnet Type)
Maximum Charge Amount : 440 kg
Hot Zone Size : Normal 32inch
Maximum Crystal Length Approx. : 2000mm
Pull Chamber Length : 3000 or 3500mm
Seed Pulling Speed (slow) : 0.10~6.00mm/min
Seed Pulling Speed (fast) : 1200mm/min
Seed Rotating Speed : 1.00~20.00rpm/Accuracy : 1%
Crucible Lifting Speed (fast, slow) : Slow 0.01~1.00mm/min, Fast 260mm/min
Crucible Lifting Capacity Approx. : 1000kg
Crucible Rotating Speed : 0.10~20.00 rpm
Crucible Lifting Stroke : Available up to 750mm
Chamber Materials Inside : SUS316L
Outside : SUS304
Maximum Height : Approx. 10,500mm
Ar Pressure / Flow : 2~3kg/㎠, Max. flow : 200LPM
Air Pressure (Valve control) : 4~6kg/㎠, Max. flow : 100LPM
Cooling Water Pressure : 2~3kg/㎠, Max 5kg/㎠
Water Consumption Approx. : 600~700LPM
Cooling Water Inlet Temp : Customer's Spec
Power Supply Maximum Power : Side heater 180kW/Bottom heater 50kW (IGBT/Option)
Dust Filter Housing : Metal Filter (Option)