Visit QEI''s booth 160 for your RF requirements!
Founded in 1971, QEI Corporation innovates, designs, and manufactures RF industrial power systems used in the Semiconductor, Laser, Scientific, and Medical industries. In the Semiconductor market, our RF generators from the Aurora and Galaxy product lines are available in power ranges from 100 to 40,000 watts with standard fixed frequencies from 1MHz to 60MHz.
QEI’s products are designed to exceed the performance requirements for RF-driven plasma systems by the semiconductor processing industry. Our RF Generators and Matching Networks will provide the reliability that’s required for your application, while lowering your overall cost of ownership.
Our wide range of control features allow our customers to customize the power delivery to the process chamber through pulsing, frequency tuning, ramping and will provide protection through our Arc Management System (AMS).