3-20-41 Higashimotomachi
Tokyo,  185-8533

  • Booth: 1426

Find your particle counting solutions with Rion!

RION Air and Liquid Particle Counting Systems - Booth 1426

0.02um Sensitivity for Chemicals and UPW!

RION Co., Ltd. of Tokyo, Japan is a world-leading producer of Laser Particle Counting systems featuring STATE OF THE ART, higher detection efficiency, and noise reduction technology. RION Laser Particle Counters are leading the way with superior technology, size, reliability, and affordability. RION Particle counting systems are technologically superior and highly reliable that allow for Higher detections efficiency than competitor models. RION Particle Counters are user-friendly, versatile, and simple to operate in batch or Inline modes. Systems are equipped with a Standard communication interface for computer operation and offer compatible options for all liquids from UPW to Strong acids. Built-in printer, Memory access card, LCD touch panel display, integrated Pulse Height Analyzer, and one-button operation are standard for all batch models. 

Come see our latest products at SEMICON West, Booth 1426.


  • 30nm Liquid-Borne Particle Counter KS-19F
    KS-19F is the industry standard designed for Chemicals like HF and many more to detect 30 nm particles. All wetted parts are PFA and Sapphire. It can be used for both in-line and off-line measurements....

  • Specification

    Optical system Light-scattering method
    Light source Diode-pumped solid-state laser (wavelength: 532nm, rated output 800mW)
    Materials of parts exposed to sample fluid Sapphire, PFA
    Measurement size range 4 channels (Factory default):≥0.03µm, ≥0.06µm, ≥0.1µm, ≥0.13µm
    Setting range 0.03µm to 0.13µm
    Flow rate 10mL/min
    Maximum particle number concentration 40,000 particles/mL (coincidence loss 10%)
    Power requirements DC12V (Supplied by KE-40B1)
    Dimensions Approx. 170 (H) x 487 (W) x 310 (D) mm
    Weight Approx. 13.5kg
  • 20nm Liquid-Borne Particle Counter KS-20F
    KS-20F is a newly designed high counting efficiency true 20 nm particle counter. All wetted parts are PFA and Sapphire. It can be used for both in-line and off-line measurements....

  • KS-20F liquid particle counter from RION Inc. is the newly designed product with high counting efficiency with true 20nm particle counting capabilities than competitive models. With high counting efficiency, the unit is able to detect particles in chemicals with low or high concentrations of particles. 


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