SVCS Process Innovation s.r.o.

Optátova 37
Brno,  CZ-63700

Czech Republic
  • Booth: 155

“Dobrý den”, we’re looking forward to meet you at our booth



We develop and manufacture batch horizontal and vertical diffusion furnaces as well as PECVD and LPCVD furnaces for the semiconductor and photovoltaic industry and also for R&D institutes. Other products include various Ultra High Purity gas source systems like gas cabinets, valve manifold boxes and custom production of gas manifolds. The heart of all SVCS devices is our own control system which is often used even for refurbishment of third party equipment.

Our 19 years of experience is built on a long history of the semiconductor industry in former Czechoslovakia. We cooperate with leading R&D laboratories, universities and science institutes to bring new products and new solutions because - Innovation makes the future.

Besides domestic market we have installations around the world, incl. Australia, EU, Hong Kong, China, India, Japan, Korea, Malaysia, Russia, Taiwan, USA and Vietnam.


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