Atonarp

46653 Fremont Blvd
Fremont,  CA  94538

United States
http://www.atonarp.com/aston
  • Booth: 1369

ASTON from Atonarp is a robust, compact mass spectrometer, designed from the ground up to be the workhorse metrology tool for gas monitoring and control for semiconductor manufacturing and industrial process control applications. High quantitative accuracy and real-time performance are combined with production-ready robustness and dependability, supporting increased throughput and maximized yields within a wide range of complex, high-precision processes in production and monitoring environments.


 Products

  • ASTON
    THE MOLECULAR SENSOR FOR ADVANCED INDUSTRIAL METROLOGY...

  • ASTON delivers real-time process control for semiconductor applications allows CVD, ALD, Etch, ALE and chamber matching in high volume manufacturing environments. Resistant to corrosive gases, contamination, and equipped with incredibly fine sensitivity, Aston is uniquely suited for real-time process control for semiconductor applications.

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