Fabmatics USA Inc.

8410 South 700 East, Suite 100
Sandy,  UT  84070

United States
https://www.fabmatics.com/
  • Booth: 451


Smart Manufacturing with Material Handling Automation

Fabmatics develops intelligent automation and robotics solutions for customers from the semiconductor and electronics industry and helps so to make their production more efficient, faster and safer.

Founded in 1991, the company has been successfully implementing customer-specific automation projects in the semiconductor industry for 30 years. This results in a strong market position, especially in the modernization of 200-millimeter semiconductor factories worldwide.

Our product portfolio includes mobile robots, robot cells, automated transport and storage systems, product identification & localization solutions, purge systems and more. Fabmatics has the unique competence to offer customer-specific automation, robotics and handling solutions for the use under cleanroom conditions, including both hardware and software, from consulting and development to production, installation and after-sales service from a single source.

Fabmatics, including its subsidiary Fabmatics USA Inc. in Sandy (Utah), is world-wide active and employs at present approximately 210 employees.

 Products

  • Mobile Robot HERO FAB
    HERO FAB is designed to fully automatically load and unload process tools and to enable fast transportation between process tools and the fab transport system or stockers/shelves in the cleanroom....

    • Our HERO®FAB series combines an established, clean and safe 6-axis robot system with a free-moving vehicle.
    It is designed to fully automatically load and unload process machines and to transport wafer carriers between load ports, stockers and racks in the clean room.
    The HERO®FAB runs completely free without rail or cable connection. This makes it the ideal and flexible alternative to permanently installed transport systems for automating even hard-to-reach areas of a semiconductor factory. The transport jobs are coordinated by the Fabmatics fleet manager (HSFM).

    Key Features:

    • Fully free-moving platform and ultimate maneuverability with omni-directional drive technology
    • Vibration-free handling with powerful, for 24/7 use proven industrial 6-axis robot
    • Charging on-the-fly during handling enables 24/7 operation
    • Vertical & horizontal laser scanners for a safe collaboration of human and machine
    • High material safety due to redundant sensors, active lock in an emergency case and occupancy check of load ports (special: earthquake protection)
    • HSFM fleet manager for multi robot management

    Learn more ...

  • Intelligent systems for space-saving storage
    Our automated cleanroom storage systems are optimally designed for fast, safe and space-saving storage and buffering of different product carriers. Our Purge system reliably protects wafers during interim storage from contamination....

    • FlatStocker: Automated Carrier Storage System for Semiconductor Plants

    FlatStocker is an innovative system to store material carriers e.g. for open wafer cassettes and H200 boxes underneath the cleanroom ceiling.

    Features:

    • Storage of product carriers, e. g. for open wafer cassettes and HA-200 boxes below the cleanroom ceiling
    • RFID and barcode technology enables location tracing of lots in real time
    • Controller software compliant SECS GEM / SEMI E88 / SEMI E84 Interface for carrier transfer to other systems
    • Flexible design adjustment according to customer needs
    • Up to ISO 3 / US FED class 1
    • Operating speed 1.5 m/s in ISO 4 clean Rooms
       

    Learn more ... 


    FOUP Purge System

    Semiconductor industry leading edge companies are developing and producing at process nodes of 28 nm and below. These smaller structures require a contamination and oxidation-free environment during production in order to exclude harmful influences like humiditiy, ambient oxygen or emission of molecules (airborne molecular contamination).These process related interactions may lead to surface defects and yield loss. Especially while wafers stored in FOUPs are waiting for the next process step, the danger of these unwanted side reactions is very high.The FOUP Purge System by Fabmatics avoids oxidation and other chemical reactions on the wafer surface by purging the FOUP with an inert gas (e. g. N2) during interim storage. The system can be easily retrofitted to existing storage modules (e .g. Zero Footprint Storage or Purge Stocker).

    Features:

    • May be easily retrofitted with existing systems for FOUP storage (e. g. ZFS, Stocker) without having to change the fab structure during regular fab operations
    • Independent purge functionality for each nest, no gas spill / waste
    • Constant gas flow during the entire storage period
    • Every purge nest is individually monitored and controlled

    Benefits:

    • Avoids AMC (Airborne Molecular Contamination) and other chemical reactions
    • Allows extended queue time between process steps
    • Improves overall process yield
       

    Learn more ...

  • RFID
    Our customized RFID and real-time location systems always ensure a transparent material flow in your cleanroom production at all times and convince with their best price-performance ratio....

    • FAB-LIPS – Local Identification & Positioning System

    FAB-LIPS is a real-time locating system (RTLS) based on ultra-wideband (UWB) technology for indoor positioning of batches or other objects in semiconductor manufacturing plants. Whether during transport, in storage or on loadports – the system enables reliable 3D positioning of hundreds of objects everywhere in the fab without extensive infrastructure such as an RFID reader per storage bin. Learn more ...

    RFID Readers, Gateways, Accessories, Reading Stations, Applications & Retrofitting

    As specialists in high complex production environments, we provide reliable RFID solutions for demanding industrial conditions. Because production is subject to constant change, we can customize and optimize our products according to your needs. You can be sure that RFID solutions by Fabmatics will suit your individual production needs exactly. Our products persuade with high quality and best cost-performance ratio. We will support you from the planning of an RFID project through installation and implementation and beyond. Learn more ...

Categories

502 Material Handling Systems
  • Conveying; Material Handling Systems
  • Robotics; Transfer Systems
  • Stockers; Storage, AMHS
    • 602 Manufacturing Software
  • Factory Automation; Cell Controller Software
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Svcs; Spares
    • 701 Manufacturing Services or Consulting
  • Automation & Robotics
  • Wafer Handling

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