Cast Aluminum Solutions LLC

1310 Kingsland Drive
Batavia,  IL  60510

United States
  • Booth: 1439

Precision Heating & Cooling Components for Wafer Processing

Cast Aluminum Solutions (CAS) designs & manufactures precision-engineered thermal components for semiconductor equipment OEMs and end-users worldwide.  We specialize in heated devices for wafer processing applications.

CAS is a leading supplier of high-uniformity, high-temperature Pedestal Heaters.  Advanced options include Multi-Zone Heating, Embedded Cooling Tubes, Integrated Gas Channels, and Precision Surface Finishes.

Supported by a newly-expanded R&D Technical Center, CAS develops, tests and manufactures high-performance heating & cooling products for critical in-chamber applications. 

CAS also manufactures innovative inline heaters such as CAST-X, PUR-X and PUR-Therm, primary for wet bench uses. 

Many customers view us as “an extension of their own engineering team.” We offer Finite Element Analysis, CFD Modeling, Infra-Red Testing, plus X-Ray and Ultrasound testing. We are your partner, from prototyping phase to high volume producution.

Headquartered near Chicago, Cast Aluminum Solutions serves customers globally via offices throughout North America, Europe and Asia.

At Semicon West 2021, please visit the CAS Team at Booth 1439 !

 Press Releases

  • June 1, 2022


    Cast Aluminum Solutions Opens New R&D Technical Center to Serve Semi Customers

    Cast Aluminum Solutions (CAS) – a leading supplier of precision-engineered thermal components for wafer processing applications – is pleased to announce the opening of its new R&D Technical Center.

    Focused on New Product Development and Performance Testing, this new facitility features industry-leading capabilities for evaluating the heating and cooling components that CAS provides to the world's largest semiconductor OEMs.

    CAS has a deep background in designing and manufacturing high-uniformity pedestal heaters, high-temperature in-chamber components, precision ring and valve heaters, as well as high-purity inline heaters compatible with solvents, DI water, and semi gases.

    CAS’s new R&D Tech Center Includes these Technologies:

    • Finite Element Analysis:  Ansys FEA enables CAS Engineers to model and simulate in-chamber wafer heating. Pedestal heaters can be tested 'virtually' to determine temperature uniformity, maximum recommended working temps, thermal expansion and surface deflection, and the associated effects upon substrate materials.
    • Infra-Red Thermal Imaging:   This important technology helps validate FEA Models, determining if 'real world performance matches the computer models' (for heating and cooling performance). The new Tech Center features Infra-Red Imaging capabilities in open air or vacuum chamber. Multipe data points along a product surface are data-logged, and linked to throttling of temperature, set-point, and power setting.
    • Life Cycle Testing:  CAS's new Tech Center features test stations with voltage variance and power supply augmentation capabilities. These instruments allow CAS Engineers to test our heated components under real world conditions, such as power surge survivability, over-temp cycling, no-load heating, and the like.  Long term performance hour tests are also available, with multi-facet data logging, providing insight on overall product life-span and anticipated replacement cycles.
    • CFD Modeling:  CAS Engineers utilize Computational Fluid Dynamics to optimize mold designs and casting processes. CFD models help eliminate mold design changes, saving resources, and shortening product development timelines. The CAS Team can lock-in ideal pour temperatures, fill rates, cooling protocols, and other factors relating to the company’s in-house aluminum foundry.
    • Vacuum Chamber Testing:   CAS’s Tech Center features a large vacuum chamber, allowing CAS Engineers to simulate the high-vacuum conditions in which our pedestal heaters normally operate.  Products can be tested “in vacuum”, with evaluation data gathered for temperature uniformity, cycle time reactivity, load/no-load dynamics, residual gas analysis, and more. Vacuum tests can also support Infra-Red Imaging, Sensarray integration, and direct-contact surface-mounted temperature sensors.

    But the new facility is more than just a lab:  the new Tech Center also features robust machining and assembly proficiencies.

    • Mazak Multi-Axis CNC Machine Centers:  CAS’s new facility features several new Mazak-brand programmable machine centers, equipped with the latest Mazitrol machine language.  These advanced CNCs facilitate seamless transitions from CAD models to programmed machine language.
    • Next-Generation CMM Machines:  CAS’s new Tech Center is equipped with the latest in programmable Coordinate Measuring Machines, to verify dimensions to the millionth of an inch.
    • ISO 6 Cleanroom:  To accommodate high-purity, contaminant-free assembly and packaging operations, CAS’s new Tech Center features a fully-functional cleanroom.

    With Design Center, Laboratory, Machining Centers, and Cleanroom all under one roof, Cast Aluminum Solutions is well-positioned to develop, test, and perfect New Product Designs in a shorter period of time, with higher-performing results.  This translates to industry-leading thermal products for semi wafer processing with a shorter 'go to market timeline.'

    The Cast Aluminum Solutions R&D Tech Center is located near CAS’s headquarters, in Batavia, IL (approx. 30 miles from Chicago), and is staffed by a dedicated New Product Development Team. 

    Tony Meadors, Divisional Vice President at CAS, further explained, “Cast Aluminum Solutions is committed to growing with our customers, as they investigate and adapt the latest in microprocessor manufacturing technologies.  This industry encompasses some of the most advanced engineering principles and processing technologies known to man....and CAS feels this new R&D Tech Center allows us to succeed in the wafer processing portion of that world. Keeping pace with our customers' ever-evolving requirements will always be a primary key our success.”

    For more information about Cast Aluminum Solutions, see our website:

    Or visit the CAS Team at Semicon West 2022, Booth 1928.

  • June 1, 2022


    Cast Aluminum Solutions Launches Industrial Heater with 1110°F / 600°C Temperatures

    Cast Aluminum Solutions (CAS) – a leading supplier of precision-engineered thermal components for semiconductor wafer processing applications – is pleased to announce the launch of its new CAST-X High Temperature Heater line.

    CAST-X High Temp Heaters feature operating temperatures to 1110°F (600°C)

    These heaters are compatible with a wide array of liquids and gases, including flammable media.

    Low flashpoint solvents, IPA, and other sensitive liquids can be heated using CAST-X High Temp.

    Appropriate gases include nitrogen, argon, process gases, and clean compressed air.  Cryogenic gases, even under significant pressures, can be safely and efficiently vaporized and heated.

    CAST-X HT is an easily-integrated “inline heater”, with industry-standard flow-tube sizes, and compatibility with worldwide voltages.  These units have a very small footprint, and are compatible with standard control panel formats.  CAST-X High Temperature Heaters are available in two sizes:

    • CAST-X HT 500, has power to 1500 Watts, and a 1/4 inch fluid/gas flow-tube.
      It is available with a certified Explosion Proof Terminal Enclosure or a No Enclosure option.  

    • CAST-X HT 2000 accommodates higher-flow applications with power to 6 kW, and a 1/2 inch flow-tube; it’s available with either an Explosion-Proof or Water-Resistant terminal enclosure.

    All CAST-X Heaters have a unique “no contact design”, where the heated media never contacts the heating element.  The heated media (which can be liquid or gas) flows through a spiral-wound stainless steel or Inconel flow-tube, which is isolated inside the heater body: high-performance heating elements are also integrated within the heater body.  This design is very safe, but also much cleaner than standard immersion heaters, where gases are in direct contact with heating elements.

    Many of today’s complex chemical reactions and advanced processing applications require temperatures that are much higher than traditional industrial heaters can deliver.  The new
    CAST-X High Temp Heater is designed to fit those advanced thermal requirements.

    According to Jeffrey Awe, Global Marketing Director at CAS, “The CAST-X Heater design has always been favored by engineers involved with complex gas vaporization processes and sophisticated solvent heating applications.  Now, with CAST-X High Temp delivering temperatures to 600°C, the potential market penetration for the CAST-X Heater family is expanded significantly.”

    Jerry Carlson, Divisional Vice President at CAS, further explained, “The CAST-X High Temp line occupies a unique position in the industrial heater marketplace.  It combines the safety and purity of an isolated fluid path with the high operating temps demanded by today’s fluid and gas applications.”

    Headquartered in Batavia, Illinois, Cast Aluminum Solutions designs and manufactures precision-engineered thermal products for OEMs and end-users worldwide.  Primary markets include semiconductor wafer processing, energy & natural gas, commercial foodservice, industrial gas & chemical processing, as well as biopharmaceutical and medical sectors. 

    For more information about Cast Aluminum Solutions, see our website:

    Or visit the CAS Team at Semicon West 2022, Booth 1928.


  • Next-Gen Stainless Steel Pedestal Heaters !!
    A leader in semi pedestal heaters, Cast Aluminum Solutions offers Stainless Steel wafer heaters with operating temps to 650°C and temp uniformity to ± 2%. In several sizes, with options for multiple heat zones, cooling tubes, and gas channels....

  • A leader in pedestal heater technology, Cast Aluminum Solutions is bringing significant advancements to Stainless Steel wafer heaters. With operating temps to 650°C, and uniformity as close as +/-2%, with minimal surface deflection, stainless steel pedestal heaters from CAS are ready to perform in the most demanding DDP, MDP and FEP applications.

    Developed using Finite Element Analysis (structural and thermal models), our SST pedestals deliver repeatable, predictable performance metrics. CAS’s stainless steel pedestals utilize our proprietary IFC (Interference Fit Construction) technique. This ensures efficient heat transfer from the element to the substrate. And IFC eliminates the need for backing plates or retention mechanisms. Customer-specific groove patterns and gas channels are available, and low-RA topside surfaces are achievable.

    Please ontact Cast Aluminum Solutions.

    Or call 630-879-2696 (U.S.)

    Visit CAS at Semicon West 2022, Booth 1928  !!

  • High-Purity Heaters for Gases & Liquids
    Cast Aluminum Solutions offers Gas Heaters, Solvent Heaters, and DI Water Heaters. All have “Isolated Flow Paths” in Teflon or 316 SS. Process media is isolated, never contacting the heating element or any other portion of the heater. UHP available....

  • Cast Aluminum Solutions offers high purity heaters for Nitrogen, Solvents, IPA, DI Water and more !

    All models have an “isolated flow-path”: high-purity gases & liquids never contact the heat element or any other portion of the heater.

    PUR-Therm Gas Delivery Heater is for chamber gases. The flowline is 316 SS, electropolished, passivated, and UHP compliant.

    PUR-X Heaters feature a removeable, replaceable Teflon (PFA) flowtube, for caustic liquids or HP gases.

    CAST-X Heaters are available in 1 to 60 kW. Flow-tubes can be SS, Inconel, Hastelloy or Monel. CAST-X is compatible with flammable media (solvents, gases, IPA) and high operating pressures.

    CAST-X High Temp Heaters feature working temps to 600°C

    Universal Solvent Heater is designed for low-flash Solvents. USH has an Electro-Polished SS flow-tube, a built-in cooling tube, multiple temp sensors, and more.

    Cast Aluminum Solutions

    Tel: 630-879-2696 (U.S.)

    Visit CAS at Semicon West 2022, Booth 1928  !!


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