Particle Measuring Systems, Inc.

5475 Airport Blvd.
Boulder,  CO  80301-2339

United States
  • Booth: 826

Welcome to Semicon West 2021! Visit us at booth 826.

Particle Measuring Systems Inc. (PMS), a subsidiary of Spectris plc, is a global technology leader in contamination monitoring, the inventor of laser particle counting, and now is the leading provider of solutions for monitoring and controlling many forms of contamination that impact companies that manufacture in ultra-clean environments.

Stop by Booth 826 to learn about cleanroom monitoring using our state of the art particle counters!


  • Chemical Particle Counter: Chem 20™
    World’s first and only true 20 nm chemical particle counter...

  • With 20 nm particle sensitivity, the Chem 20 Chemical Particle Counter from Particle Measuring Systems (PMS) is the world’s most sensitive particle sensor for high purity process chemicals and latest edition to our full line of liquid particle counters.

    Extensive data on chemical distribution and packaging systems proves that the Chem 20 chemical particle counter, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.

  • 20 nm Liquid Particle Counter: Ultra DI® 20
    Sensitivity range: 20 - 100 nm...

  • Designed specifically for ultrapure water systems, the Ultra DI® 20 Liquid Particle Counter from Particle Measuring Systems PMS quickly obtains statistically meaningful data and will count and size contaminants as small as 20 nmConsistency helps you get more out of your data, even if the instrument moves, so you have more control over your process. The Ultra DI 20 Liquid Particle Counter has a low zero count, large sample volume and high counting efficiency that provides unsurpassed particle detection. Improved sensitivity allows you to detect process variations more quickly with 20 nm polystyrene latex (PSL) and 9 nm gold (Au).

    Particle Measuring Systems (PMS) is the world leader in sensitivity.

  • AirSentry® II Mobile AMC Detection System
    Mobile Airborne Molecular Contamination Detection System...

  • Designed to enhance AMC monitoring programs, the AirSentry II Mobile AMC Monitor is the first truly mobile system for monitoring airborne molecular contamination in cleanrooms. Mobility plays an important part in a strategic airborne molecular contamination monitoring program, allowing contamination sources to be quickly located, quantified and eliminated. Part of Particle Measuring Systems complete line of Airborne Molecular Contamination (AMC) Monitors.

    A local touch PC on the mobile cart provides instant feedback of AMC levels at each monitoring location. Facility Net software provides data storage and graphical displays in real-time while monitoring the specific environment

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