In-line Wafer Temperature and Wet Chemistry Monitoring.
CI Semi, a division of CI Systems Ltd, develops, manufactures and markets process monitoring and control systems for the semiconductor, solar PV, LED and FPD markets. Active in the semiconductor process equipment market since 1992, CI offers non contact wafer temperature monitors and wet process concentration monitors to OEMs and to end users.
CI''s family of noncontact temperature monitors (the NTM line) incorporates real-time, same point emissivity measurement and compensation, making them the ideal solution for in situ process monitoring.
CI’s family of wet process analyzers (WetSpec line) offers cost effective solutions for in-line wet chemistry monitoring. These range from conductivity and NDIR solutions for concentration measurement of simple chemistries, to spectroscopic systems for measuring multiple constituents and residues in complex solutions.