Large Semiconductor Chip Fabricator Reduces Environmental Impact, Maintains Productivity, and Saves Big on Operational Costs.
Project Highlights:
- Client needed an abatement system with over 100,000 SCFM (160,500 Nm3/hr) volume processing capacity and over 98% VOC removal efficiency
- Anguil compiled a system of a rotor concentrator wheel, custom-designed thermal oxidizer with a destruction efficiency rate (DRE) of >99.5%, and a specialized heat exchanger
- Each system was able to meet and exceed the processing capacity and destruction efficiency requested, with the processing capacity double that of the two previous systems combined
The Challenge
As a large semiconductor chip fabricator, this customer realized the environmental effects of their operation. The fabrication of semiconductor chips generates significant amounts of wastewater and waste gases, both of which require treatment prior to their release into the sewer system or atmosphere, respectively. As fabrication operations have grown, so too has the amount of waste produced and, consequently, the need for abatement technology.
The customer approached our team with a request for a new abatement system for their plants. They came to us to stay ahead of their competition by tackling the challenge of reducing their environmental impact without sacrificing their facilities’ productivity and output. While they were currently employing the use of two systems, each with capacities for less than 50,000 SCFM (80,250 Nm3/hr), they were looking for a more efficient and effective solution. Ultimately, they were seeking a system that doubled their SCFM volume processing capacity with a 98% VOC removal level.
Their exact system requirements were as follows:
- >100,000 SCFM (160,500 Nm3/hr) volume processing capacity in a single system with the same footprint as the two existing pollution control devices
- >98% VOC removal efficiency
- No upstream pressure fluctuations
The Solution
After reviewing the customer’s requirements and discussing the project objectives with the customer, our team decided that rotor concentrator thermal oxidizers (RCTO) would be the ideal air pollution control solution. The solution that was designed and constructed featured a zeolite rotor concentrator wheel sized to handle more than 100,000 SCFM (160,500 Nm3/hr) of process air and a custom-designed thermal recuperative oxidizer (TO) with a destruction efficiency rate (DRE) of >99.5% and specialized heat exchanger constructed to minimize silica build-up and facilitate maintenance operations.
Once fully assembled, all three systems were installed on mezzanine levels of the existing plants. After installation, our technicians completed final commissioning and provided comprehensive operator training. Ultimately, the customer was left with a system that met their needs and a team trained to properly use that equipment.
The Result
At the end of the project, the customer was fully satisfied with the performance of all three systems. Each system was able to meet and exceed the processing capacity and destruction efficiency requested, with the processing capacity double that of the two previous systems combined and the destruction efficiency surpassing that of the one required.
Additionally, by replacing their old air pollution systems with our more effective and efficient system, the customer was able to save on floor space and operational costs.
