Advanced Energy

1595 Wynkoop St
Suite 800
Denver,  CO  80202

United States
http://www.advanced-energy.com
  • Booth: 834


Welcome to Advanced Energy at SEMICON West 2021!

Advanced Energy® (AE®) has devoted more than three decades to perfecting power—enabling design breakthroughs and driving growth for leading semiconductor and industrial customers. Our precision power and control technologies, along with our applications know-how, inspire close partnerships and perpetual innovation for semiconductor and industrial customers.

AE process power products provide leading, field-proven power control and arc-management capabilities that enable complex semiconductor processes and other high-technology applications.

Our high-voltage power systems serve high-tech and industrial applications from x-ray and scientific analysis to intense pulsed light and mass spectrometry.

AE thermal products offer precision temperature measurement and control, while AE power control modules provide exceptional quality for heating, melting, bending, forming or drying in a wide variety of industrial applications.


 Press Releases

  • Ascent® SMS AP power supply with enhanced arc management and built-in process characterization capability can be configured to optimize throughput and yield  

    DENVER, Colo., December 7, 2021 — Advanced Energy (Nasdaq: AEIS) – a global leader in highly engineered, precision power conversion, measurement and control solutions – has expanded its family of plasma power generators with a 10 kW pulsed DC power supply that combines industry-leading power and control capabilities with PowerInsight by Advanced Energy™ embedded process optimization software. With patented pulsing technology, the Ascent® SMS AP (Advanced Pulsing) power supply brings optimal arc management and precise plasma control to the most challenging thin film deposition applications ranging from semiconductor to solar PV manufacturing.

    The compact 10 kW Ascent SMS AP has the widest safe operating area (SOA) with peak voltages up to 1200 V and frequencies from 0.5 to 150 kHz. Its four-block progressive arc management system with a full voltage reversal is the industry’s most advanced solution, providing the lowest arc energy with available self-adjusting arc parameters that will dynamically move with the process. The AP waveform delivers boost voltage, reverse voltage control and advanced pulse shaping that enables fine-tuning to tailor film morphology and desired film properties.

    “Advanced Energy continues to push the performance of pulsed DC power supplies with unprecedented adaptability in single-magnetron sputtering applications,” said Dhaval Dhayatkar, senior director of marketing, plasma power products at Advanced Energy. “Packed with our most advanced technologies including a highly configurable waveform, progressive arc management, best-in-class SOA, wide frequency range and our PowerInsight process optimization software, the new 10 kW Ascent SMS AP power supply enables our customers to achieve the highest possible levels of precision, repeatability and yield in advanced semiconductor processes.”

    The new unit is the first AE power supply to embed PowerInsight process characterization and optimization software. Simplifying the collection, analysis and translation of data from critical power delivery systems, PowerInsight provides actionable intelligence that can be applied to optimize processes for improved throughput and yield, as well as reduce unplanned downtime of process equipment. With PowerInsight, Advanced Energy’s pulsed DC power supplies minimize arcing while enhancing deposition rate, film morphology and film properties.

    For detailed product information and technical specifications, visit www.advancedenergy.com/products/plasma-power-generators/pulse-dc-systems/ascent-ap-series.

    The 10 kW Ascent SMS AP power supply will be showcased at AE’s booth 834 at SEMICON West 2021, which takes place December 7-9 at the Moscone Center in San Francisco, CA.

    About Advanced Energy

    Advanced Energy (Nasdaq: AEIS) is a global leader in the design and manufacturing of highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex applications for a wide range of industries including semiconductor equipment, industrial, manufacturing, telecommunications, data center computing and healthcare. With engineering know-how and responsive service and support around the globe, the company builds collaborative partnerships to meet technology advances, propel growth for its customers and innovate the future of power. Advanced Energy has devoted four decades to perfecting power for its global customers and is headquartered in Denver, Colorado, USA. For more information, visit www.advancedenergy.com.

    Advanced Energy | Precision. Power. Performance.

    # # #

    For press inquiries, contact:

    Simon Flatt/Emma Jenkins

    Grand Bridges Marketing Limited

    [email protected]

    +1 310 529 0321

  • Integrating power sensor and meter into a single easy-to-use instrument, the new RF power meter simplifies monitoring and enables precise control

    DENVER, Colo., December 8, 2021 — Advanced Energy (Nasdaq: AEIS) – a global leader in highly engineered, precision power conversion, measurement and control solutions – today announced the GEMINI™ 5540A RF (Radio Frequency) power meter. The new power meter delivers highly accurate in-line RF power measurement in a flexible and convenient integrated unit for applications requiring precision RF power control in semiconductor, communication, industrial and medical markets. As the leader in RF power solutions in the semiconductor industry, Advanced Energy continues to bring new capabilities for improving plasma power controls and performance of advanced etch and deposition processes.

    Combining sensor and meter capability into a single, easy-to-use instrument, the GEMINI 5540A measures at frequencies from 0.2 to 200 MHz and powers from 3 to 5,000 W with 2-sigma accuracy of ±0.5% + 0.5 W. This integrated instrument enables users to replace multiple instruments with a single meter for applications that require precise measurement and control of RF power.

    “In demanding semiconductor processes such as high aspect ratio (HAR) plasma etch, precise control and chamber-to-chamber matching of the RF system directly impact process performance,” said Gerry Blumenstock, vice president, critical sensing and control products at Advanced Energy. “With the new GEMINI 5540A, OEMs can accurately calibrate the system and monitor RF power in real time, improving the fidelity and consistency of leading-edge plasma-based processes.”

    The GEMINI 5540A incorporates a large, easy-to-read OLED digital display that simultaneously shows forward and reverse power, voltage standing wave ratio (VSWR) and frequency. It automatically senses frequency with no reconfiguration required for forward and reverse power measurements. The meter reduces calibration to every 12 months, compared to six months for conventional instruments. It operates with a 5 V, 500 mA input supplied via a standard USB 2.0 port using either an external battery or AC power outlet and off-the-shelf USB adapter.

    In addition to taking measurements directly, the meter can also be connected to a PC for collection, storage and audit of data using Advanced Energy’s GEMINI Tools data visualization software.

    For detailed product information and technical specifications, visit www.tegam.com/shop/rf-microwave/power-meters/no-product/gemini-5540a-rf-power-meter

    The GEMINI 5540A is showcased at AE’s booth 834 at SEMICON West 2021 alongside other solutions for semiconductor manufacturing, including AE’s fast, accurate and reliable match networks. SEMICON West 2021 takes place December 7-9 at the Moscone Center in San Francisco, CA.

    About Advanced Energy

    Advanced Energy (Nasdaq: AEIS) is a global leader in the design and manufacturing of highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex applications for a wide range of industries including semiconductor equipment, industrial, manufacturing, telecommunications, data center computing and healthcare. With engineering know-how and responsive service and support around the globe, the company builds collaborative partnerships to meet technology advances, propel growth for its customers and innovate the future of power. Advanced Energy has devoted four decades to perfecting power for its global customers and is headquartered in Denver, Colorado, USA. For more information, visit www.advancedenergy.com.

    Advanced Energy | Precision. Power. Performance.

    # # #

    For press inquiries, contact:

    Simon Flatt/Emma Jenkins

    Grand Bridges Marketing Limited

    [email protected]

    +1 310 529 0321


Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".


For Technical Support with this webpage, please contact support.