Daido Steel Co., Ltd.

6-35 Konan 1-chome
Daido Shinagawa Building
Minato-ku,  Tokyo  108-8478

Japan
http://www.daido.co.jp
  • Booth: V6


"Beyond the Special" - Welcome to Daido Steel!

Based in Nagoya, Japan, Daido Steel is one of the largest specialty steel manufacturers in the world. Our materials are supporting various industries, from automotive, aerospace, power generation, and industrial machinery to computers and smartphones.

At SEMICON West 2021, we will be highlighting ultra-high purity 316L stainless steel, “CLEANSTAR” which has been playing an important role in the gas delivery systems in semiconductor manufacturing equipment and facilities in Asia.

We will also introduce, “316L-F20” which is a SEMI F20 fully compliant UHP Grade 316L stainless steel and other stainless steels & nickel alloys used in semiconductor manufacturing processes, which include Daido original, high-performance alloys, such as "DSR40N" and "DSA760" for special applications.


 Products

  • #1: CLEANSTAR: Ultra High Cleanliness SS316L
    CLEANSTAR is a series of 316L stainless steels exclusively developed for semiconductor manufacturing environment....

  • With advanced melting/refining/remelting technologies, nonmetallic inclusions and gas components are significantly reduced.
    In addition to superior corrosion resistance form reduced carbon content and nonmetallic inclusions as well as increased nickel content, manganese is also reduced to prevent welding fumes, offering the highest level of cleanliness in the gas distribution systems.
    CLEANSTASR has three grades:
    • CLEANSTAR-A: VIM-VAR (double melt)
    • CLEANSTAR-B: AOD-VAR (double melt)
    • CLEANSTAR-C: AOD (single melt)
    CLEANSTAR performs better than general 316L in terms of higher CPT (Critical Pitting Temperature) and corrosion weight loss.
    With proper electropolishing and passivation, all CLEANSTAR grades satisfy SEMI F19 UHP grade requirements while CLEANSTAR-A and -B exhibit especially high surface qualities.
  • #2: 316L-F20: SEMI F20 Compliant SS316L
    Daido now offers a SEMI F20 fully compliant UHP Grade 316L stainless steel....

  • Using the same manufacturing technology as our CLEANSTAR, with advanced AOD-VAR melting & refining techniques, the new, "316L-F20" grade offers a faster way to adopt Daido's quality steel with confidence.

    316L-F20 also has higher corrosion resistance (CPT and corrosion weight loss) and better surface performance after electropolishing and passivation than general 316L and satisfies SEMI F19 UHP grade requirements.
  • #3: Various Stainless Steels & Nickel Alloys
    Daido's specialty materials are used in various process steps in semiconductor manufacturing – eg. CZ furnace chamber and lapping base plate, as well as gas delivery system components....

  • We offer not only various standard stainless steels & nickel alloys but also original, high-performance alloys for special applications. Here are some examples:
    • DSR40N, Daido’s original martensitic stainless steel, has good corrosion resistance equivalent to 17-4PH with the hardness reaching 58-60 HRC by hardening and tempering with sub-zero treatment.
    • DSA760, a revolutionary Ni-Cr-Al alloy with
      • room temperature hardness reaching 60 HRC by aging treatment,
      • high temperature hardness maintained over 500 HV up to 700 °C,
      • excellent corrosion resistance to withstand even some acids,
      • and non-magnetic.
    With such unique performance, DSA760 may enable new process innovation.

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