A Major Evolution in Process Control and Optimization
Atonarp Aston™ is a robust compact mass spectrometer, designed from the ground up to be the workhorse metrology tool for gas monitoring and control for semiconductor manufacturing and industrial process control applications. High quantitative accuracy and real-time performance are combined with production-ready robustness and dependability, supporting increased throughput and maximized yields within a wide range of complex, high-precision processes in production and monitoring environments.
https://www.atonarp.com/products/aston