The PRIME MOVER™ is a very compact actuator for wafers or other components that provides micron level placement repeatability with its smooth actuation and multi-position capabilities. The actuator’s edge welded diaphragm metal bellows act as the force-generating mechanism instead of a piston. Differential pressure across the bellows will compress or extend it with the benefit of also providing a hermetic seal.
Take advantage of the servo-pneumatic design that will provide varying motion profiles for improved throughput.