TALYS ADP300 series, the dual channel analysis system is a state-of-the-art analyzer suited for real-time, batch-type, or single-wafer tool monitoring of wet etching, cleaning, or photoresist (PR) removal processes.
This low cost, high-performance wet bath monitor allows real-time end-of-bath alerts and enables effective bath dosing.
Wet chemical processes
• Provide non-invasive monitoring of wet processes
• Allow real-time end-of-bath alerts
• Guard against excursions
• Enable effective bath dosing for bath-life extension