Wacom Quartz can repair any of the ASM Epitaxy system quartzware, including Rings, Getter Supports, and the small setup tools such as flags and picks.
Manufacturer of Furnace Tubes, Wafer Carriers, End Caps & Plates, Sleds, Handles, Push and Pull Rods, Thermocouple Sheaths, Acid Distiller / Condenser / Re-boiler, Process Tubes, Wafer Carriers, Pedestals, Single Wafer Chambers, Susceptor Shafts and Supports (Spiders).
Wacom Quartz can build according to your drawing or help design one to meet your specialized needs.