Driven with voice coil linear motors and piezo motors and flexure guides for ultra-precision guiding precision, travel ranges of 7mm and 800 microns are achievable, respectively.
The new P-725 high speed nano-focus stage integrates wear-free, lever-amplified piezo drives for 24/7 operations without particle generation. The P-725 mechanical design provides with high stiffness for high dynamics and short settling times and for high payload of larger objectives. Up to 800μm travel to match wafer thickness and subnanometer resolution.
The V-308 voice-coil nanofocus slide system provides 7mm of highly dynamic travel with nanometer resolution. It is guided by high-precision crossed roller bearings. The centrally mounted linear voice-coil motor was developed by PI for high dynamics, fast settling, and high resolution. Acceleration to 0.8g and velocity to 8”/sec are feasible, and extremely short step-and-settle times <15msec (step size to 1/4µm) within an error band of only ±15 nanometers. PI’s proprietary PIOne, picometer resolution interferometric optical incremental encoder is integrated