When a leak occurs on complex or large volume systems, such as process chambers or forelines, high performance leak detectors are needed in order to speed up the leak detection process, thus reducing equipment downtime. Thanks to their outstanding performances, ASM 390 & ASM 392 are the perfect choice for your leak tightness challenges, insuring process quality and optimized MTBF. In addition, these detectors are Semi S2 certified, responding to all semiconductor market requirements.