Measures 0.1μm Particles in Photoresist, SOG, and other solutions
- - Can be connected to the multiple monitoring systems
- - Optional dynamic range upgrade (0.07-0.5um)
Optical system |
Light-scattering method |
Light source |
Diode-pumped solid-state laser (wavelength: 532nm, rated output 500mW) |
Materials of parts exposed to sample fluid |
Synthetic quartz, PFA |
Measurement size range |
5 channels (Factory default): ≥0.1µm, ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
Setting range 0.1µm to 0.5µm |
Flow rate |
5mL/min |
Maximum particle number concentration |
9,600 particles/mL (coincidence loss 10%) |
Power requirements |
DC12V (Supplied by KE-40B1) |
Dimensions |
Approx. 164 (H) x 464 (W) x 305 (D) mm (excl. protruding parts) |
Weight |
Approx. 12.5kg |