NANOTECH Inc.

261-1 Daeji-ro Suji-gu
Yongin-si, Gyeonggi-do,  16882

Korea (South)
http://www.nanotek.com
  • Booth: 2062

Welcome to NANOTECH, Inc. at booth #2062

NANOTECH, Inc. is manufacturing company of in-situ monitroing sensor of semiconductor/display process, located in R.Korea.

Our repesentitive products is SPOES(Self-plasma Optical Emission Spectrometer), EPD(End Point Detector) and Plasma Monitor

All products are installed with customized our own S/W for process control of semiconductor/display.

We've developed the plasma generating/source and spectrum analysis techniques for the 1st time in Korea, still striving to develop high-tech, advanced solutions with our know-how.

Here in 2022 Semicon West, we would like to show you our SPOES for in-situ leak detection and EPD for end point detection in the semiconductor manufacturing process. 

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Please visit our website, we are welcom your any inquires!

www.nanotek.com


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