Levitronix Technologies, Inc.

10 Speen Street
Suite 102
Framingham,  MA  01701

United States
http://www.levitronix.com
  • Booth: 1551

Levitronix® markets pumps, flowmeters, flow control systems, mixers, viscometers and fans to the Semiconductor Industry. Levitronix® pumping systems use a revolutionary magnetic levitation technology, which allows for contact-free, and thus, particle-free operation. With no mechanical wear, Levitronix® pumps are ideal for CMP slurry handling, metal plating processes, wet cleaning and etching, and high purity fluid transfer and delivery. Levitronix® pumps deliver continuous flow allowing for precise electronic control of flow and pressure.

The Levitronix® pumping systems are designed for high-purity fluid applications where extremely low particle shedding and metal contamination are required. Tests conducted by an independent laboratory prove that particle generation from a Levitronix® pump is significantly less than that from diaphragm pumps. Comparative tests among Levitronix®, bellows and diaphragm pumps, conducted with CMP slurries, showed the Levitronix® pumps producing 200-1,000 times fewer large particles which can scratch and damage wafers.

 Products

  • BPS-i600
    Ultrapure Pump System for Microelectronics Wet Applications...

    • The Levitronix® BPS-i600 is designed for ultrapure processing of delicate fluids in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down.
    The impeller and casing are both made from chemical-resistant high purity fluoropolymer resins. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed. The motor and pump controller are integrated into the driver housing resulting in a significantly reduced footprint.
  • Levitronix® LFS
    Ultrasonic High-Precision Flow Measurement for Microelectronics Wet Applications...

    • The LEVIFLOW® LFS inline sensor is designed for non-invasive high precision flow measurements of high purity fluids. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid. The wet material is made from PFA and resistant against harshest chemicals.
  • Levitronix® BFS
    Chemically Resistant MagLev Fans...

    • The Levitronix® Bearingless Fan System BFS is designed for demanding applications in microelectronics manufacturing. Based on active magnetic levitation, the fan impeller is suspended and driven by the magnetic field of the motor. The wide gap between impeller and stator ensures that there is no wear and therefore virtually no particle generation, making it the purest fan. As the impeller and stator are completely encapsulated, the fan is extremely resistant against aggressive media and is rated for use in explosive atmospheres.

Categories

207 Process Equipment
  • Chemical Mechanical Polishing
  • Coat; Develop; Resist Processing; Track Equipment
  • Deposition; (CVD, PVD, ALD, Plating)
  • Deposition; PVD; Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Lithography/Exposure
  • Plating; Electro Chemical Plating; Deposition Systems
  • Spin on Glass (SOG); on Dielectric (SOD) Track systems
    • 400 Components, Parts & Accessories
  • Flow Control: Valves; Meters; Gauges; Regulators; MFC's
  • Motors; Fans; Electric Rotary Spindles
  • Sensors
    • 401 Sub-systems
  • Process Monitoring systems
  • Pumps, for Fluids
  • Ultrasonic Generators; Transducer and Monitoring Systems
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Chemical; Pure Water; Fluid Handling; Storage; Supply Sys.
  • Chemical; Pure Water; Fluid Monitoring & Control Systems
  • Process Controls

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