Kanomax Holdings

4104 Hoffman Road
White Bear Lake,  MN  55110-3708

United States
https://www.kanomaxfmt.com/
  • Booth: 1360


World Leader in Sub-15nm Particle Measurement

Kanomax is the World Leader in Sub 15-nm Particle Measurement.  With instruments that measure particles down to 2nm, independent of composition or shape, our capability is out in front of the IRDS roadmap.

Stop by booth #1360 to see these exciting products:

  • The Scanning Threshold Particle Counter 3(STPC3) is the first commercially-available on-line particle counter capable of detecting particles as small as 3 nm in UPW and in dilute solvents (IPA does not need dilute). The STPC3 is great for measuring both Residue (Particle Precursors) and Native Particles, and so monitoring any yield killers that traditional OPCs miss.
  • The Liquid Nanoparticle Sizer (LNS) gives actual (not relative) concentrations of colloidal suspensions from 6 to 360 nm.  The LNS is a great choice for characterizing and controlling CMP slurries.
  • The Nano SpotLight System (NSL) extracts and deposits individual particles in UPW > 5nm onto a << 1mm spot for easy SEM analysis.  The NSL is great for analyzing, fingerprinting, and troubleshooting UPW systems.

Kanomax products can help solve your toughest particle measurement and control challenges - please visit our booth to learn how!


 Products

  • SCANNING THRESHOLD PARTICLE COUNTER 3 - STPC3
    This is the particle counter capable of detecting particles as small as 3 nm in UPW and in dilute solvents (IPA does not need dilute), for measuring both Residue (Particle Precursors) and Native Particles,and monitoring any yield killers that OPCs miss. ...

  • Specifications

    Measurement range: 1E3 to 1E10 particles/mL

    Inspection volume rate: 0.5 - 3 μL/min

    Threshold sizes: 3, 9, 15 nm

    Number of size channels: 1-3 (user configurable)

    Dead time between channel adjustment: 5 minutes

    Total flow rate: 50-280 mL/min

    Response time to concentration change: <30 seconds

    Inlet water pressure (online): 200-500 kPa (30-70 psig)

    Compressed air/nitrogen flow rate/pressure: 2.5 std L/min CDA or Nitrogen,

    340-410 kPa (50-60 psi) ANSI IS08573-1:2010 Class 2 for compressed air

    Wetted surface materials before nebulization: PFA, PTFE, PEEK, sapphire

    Detector working fluid: Reagent-grade (or better) n-Butyl alcohol

    Working fluid consumption rate: Approximately 150 mL/day (bottle lasts for

    one week when cycling all three channels)

    Ambient temperature range: 15-35°C (59-95°F)

    Ambient relative humidity range: 0-85%

    Maximum water temperature: 50°C (122°F)

    Dimensions (W × D × H): 42 × 43 × 27 (43 with bottle) cms, 16.7 × 16.8 × 10.5

    (16.8 with bottle) inches

    Weight: 16.1 Kg (35.5 lbs)

    Power (Nebulizer): Universal 100-240 VAC, 50/60 Hz, 90 W max

    Power (CPC): Universal 100-240 VAC, 50/60 Hz, 210 W max

    Communication Interfaces: Ethernet, Wi-Fi, USB, Analog 4 – 20 mA

    Internal storage: Micro SD

    Ultrapure water inlet: ¼ inch PFA Flaretek®

    Waste outlet: ¼ inch SS Swagelok®

    Compressed air inlet: ¼ inch SS Swagelok®

    Detector vacuum: ¼ inch SS Swagelok® Port

    Display: 7 inch TFT Color, touch panel

    Shipping drain: Colder brand quick disconnect

    *Specifications subject to change without notice.

  • 0.1 MICRON PARTICLE COUNTER MODEL 3950
    This revolutionary 0.1-0.3 micron 2-channel particle counter comes in one of the lightest form-factors available clocking in at only 7.5lbs (3.4kg). It is designed for high-end contamination control environments....

  • Amazingly lightweight particle counter with 0.1 micron sensitivity. This revolutionary 0.1-0.3 micron 2-channel particle counter comes in one of the lightest form-factors available, clocking in at only 7.5lbs (3.4kg). It is designed for high-end contamination control environments and can be used for standalone operation or as part of an existing monitoring system to accommodate a vast array of applications.

    Device operation is made easy with its built-in 4.3 inch LCD color touchscreen, ability to store up to 10,000 records, and USB data transfer capability.

    (PRODUCT SPECIFICATIONS)

    Measuring method: Light Scattering

    Size distribution: 2 channels (0.1 and 0.3 micron)

    Flow rate: 0.1 CFM (2.83 L/min) Accuracy: ±5% (Compliant with JIS B9921 and ISO21501-4)

    Sampling time: From 6 seconds to 99 minutes and 59 seconds in one (1) sampling time

    Interval time: From 6 seconds to 99 minutes 59 seconds (Interval between the start and the next start of the repeat measurements)

    Sampling cycle: From 1 to 9999 cycles or continuous samplings

    Location classification: 99 locations

    Measuring mode: Repeat, Single, Continuous, Calculation

    Maximum measurable concentration: 10,000,000 particles/m3 (Coincidence loss: less than 10%) (Compliant with JIS B9921 and ISO21501-4)

    Counting efficiency: 50±20%(for PSL particles near the minimum measurable size) 100±10%(for PSL particles of 1.5 to 2 times as large as the minimum measurable size) (Compliant with JIS B9921 and ISO21501-4)

    False count: ≤1 particle/35 minutes(Compliant with JIS B9921 and ISO21501-4)

    Size resolution: ≤15% (for PSL particles around 0.3 μm)(Compliant with JIS B9921 and ISO21501-4)

    Display and Operation:  4.3 inch color LCD with touch panel

    Communication: USB (Host: for printer, and for USB memory, Device: for PC), Modbus (Ethernet, RS485: 9600, 19200, 38400 baud)

    Recording Media: Built-in memory, Up to 8 MB, CSV format

    Dimension:  W150 X H163 X D228 mm

    Weight : 3.4 kgs.

    Guaranteed Time of Operation: Within 8 hours per day, within 240 days per year


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