Akrion Technologies Inc.

6330 Hedgewood Drive
Ste 150
Allentown,  PA  18106-9268

United States
http://www.akriontech.com
  • Booth: 351


Please visit to see our expanded wet process tool lines.

Located in Allentown, Pennsylvania, Akrion Technologies is a leading supplier of advanced surface preparation systems and processes used in the manufacture of semiconductor and related devices.

The standard offerings and custom solutions we develop are used in numerous steps during the manufacturing process to prepare the surface of the silicon wafers on such products as MEMS, flat panel displays, logic devices, analog devices, photovoltaic/solar cells, Flash memory and DRAM. Each process step in device manufacturing presents an opportunity for contamination, which can result in defect formation and device failure, therefore critical cleaning is an integral part of our equipment’s capabilities. 

Akrion Technologies offers a family of product solutions for wet cleaning, CVD, dry etch and diffusion. As feature sizes shrink and devices increase in complexity, more process steps and advances in technology are paramount. Our aggressive R&D roadmap targets new applications in IC, MEMS, and Advanced Packaging.


 Products

  • Pinnacle 200
    Wet Batch Immersion for Digital IC Technology...

  • Akrion Technologies’ newest cassetteless batch immersion wet stations, the Pinnacle 200 offers Digital IC customers the next level of efficiency in wet etch and clean processes. The combination of tank designs, in-situ process control, circulation/filtration system and robotics ensures Digital IC IDMs of having a process tool that will enable them to push the technology limits both today and in the future.
  • Saqua
    Single Wafer for Digital IC Technology...

  • As a consequence of the wafer handling, deposition, etch, & photolithography process steps, submicron particles and other contaminants deposit onto the wafers, both front-side and back-side, and need to be removed prior to critical deposition steps. Akrion Technologies’ SAQUA series 300mm single wafer cleaning tool offers Digital IC manufacturers a multi-chamber production tool with high cleaning selectivity and efficiency at the smallest particle size.
  • Pinnacle 300
    Wet Batch Immersion for Digital IC Technology...

  • Designed for the most cutting-edge devices, the fully-automated, carrierless PINNACLE 300 batch immersion wet stations utilize the most advanced wafer handling and process control subsystems to ensure the optimum process results for 300mm wafer manufacturers of digital integrated circuits.

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".