KUKA Robotics Corporation
KUKA showcases Mobile robotic solution for wafer handling
Stop by KUKA Robotics booth #250 to see KUKA Mobile Platform (KMR) in action. The KMR, outfitted with a mobile platform and 14kg collaborative iiwa robot both come equipped with cleanroom class ISO 3 ratings. The KUKA solution allows automated transfers & handling of semiconductor cassettes with the help of Mecanum wheels which enable omnidirectional motion. Sensors on the mobile platform sense the working enviroment in real time, thereby avoiding collisions. The human-robot collaboration capable LBR iiwa is installed on the platform, which ensure proper handling of sensitive wafer cassettes with vibratons.
KUKA's wafer handling software solution blends seamlessly into the Manufacturing Execution System of the semiconductor manufacturer. With the help of KUKA fleet manager software, manufacturers can ensure an optimally automated semiconductor production.
All solutions are from a single source, this resulting in extremly short commissioning times, making this system the most flexible handling solution on the market.