Inteleg®Inline R is a rugged, ultra-low-drift Sheet Resistance measurement system for serial production and routine laboratory use. This versatile contactless instrument measures the properties of conducting layers precisely and in real-time.
Inteleg®Inline R is a 24/7 product that automatically recognises the measured material and informs instantly of layer quality deviations. It operates comfortably at various measurement ranges, covering a wide range of advanced thin-film materials and critical processes.
Inteleg®Inline R controller provides multi-channel fast feedback (PID) process control (e.g. power level, gas flow) that keeps layer properties constant, optimises quality, prevents scrap, and maximises yield. The system is designed to last tens of thousands of hours, is highly reliable, and offers a low ownership cost.
The fully digital system features embedded sensors communicating data and signals, including alarms, over industrial PROFINET, EtherCAT and Modbus/TCP networks. The absence of analogue signal cables is an additional bonus that enables tidy and compact field deployment.