Senior Metal Bellows

1075 Providence Highway
Sharon,  MA  02067

United States
https://www.metalbellows.com
  • Booth: 660


Visit Senior Metal Bellows at Booth #660

SMB developed the edge welded metal bellows concept in the 1950s and has since leveraged the technology to meet demanding requirements for the aerospace, medical, energy, and semiconductor industries.

SMB designs and manufactures bellows-based seals, feedthroughs, and actuators to meet exacting requirements for reliability and precision.  Save time by utilizing our vertically integrated resources, from design to prototypes to testing to volume production.  Let our full scope of resources improve your time to market.

We provide innovative designs to meet challenging requirements in demanding applications. Talk to us to see how SMB can take your concept to the next level.  

Our PRIME MOVER is a very compact actuator for wafers or other components that provides micron level placement repeatability with its smooth actuation and multi-position capabilities. The actuators' edge welded diaphragm metal bellows act as the force-generating mechanism instead of a piston. Differential pressure across the bellows will compress or extend it with the benefit of also providing a hermetic seal. 

 Products

  • PRIME MOVER™ Actuator
    Our PRIME MOVER™ is a unique linear actuator that provides superior reliability and maintenance-free performance....

    • PRIME MOVER™ uses a welded metal bellows (essentially a hermetic spring) as the force generating mechanism instead of a traditional piston. As a pressure differential is applied across the bellows, it compresses or extends. If external pressure is applied, the bellows compresses, extending the actuator. If pressure is removed, the bellows spring force retracts the actuator. Double actuating versions are also available.

    The Senior Advantage

    • All-welded construction to highest quality standards
    • All metal / withstands exotic/corrosive fluids, etc.
    • Zero friction / Zero leakage
    • Trouble-free operation (accurate and repeatable)
  • Pedestal Lift
    The Senior Metal Bellows design showcases the ability to easily adjust and secure Pedestal XY and Tilt positions while installed under vacuum in “up” or “down” positions....

    • Senior Metal Bellows has analytical capabilities to predict performance effects of imposing lateral and angular offsets in bellows:

    • Imposing lateral offset across a relatively large stroke substantially reduces life
    • Design significantly increases bellows life by disassociating offset stresses from axial (stroke) stresses

    We offer integration ability to supply entire lift assembly complete along with engineering capabilities to design common lifter for multiple configurations.

Categories

207 Process Equipment
  • Deposition; (CVD, PVD, ALD, Plating)
  • Deposition; PVD; Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
  • Ion; E-Beam Milling Etching Equipment
  • Transfer Systems for Wafer; Reticles or FPD's
    • 400 Components, Parts & Accessories
  • Chucks for Wafer and other Substrates
  • Flow Control: Valves; Meters; Gauges; Regulators; MFC's
  • Gaskets; Seals; O rings; Elastomers; Resins
  • Piezo Electronic Components
  • Raw Material & Custom components; Metal
  • Vacuum Systems Components and Accessories
    • 401 Sub-systems
  • Handling; Transfer; Loading Systems; Lifting devices
  • Hydraulic Systems
  • Motion control systems; Servo control systems & Components
  • Pneumatic Systems; Pneumatic rotary spindles
  • Pumps, for Fluids
  • Pumps, Vacuum
    • 701 Manufacturing Services or Consulting
  • Manufacturing Process Support and Development

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