RION CO., LTD.

3-20-41 Higashimotomachi
Kokubunji
Tokyo,  185-8533

Japan
http://www.rion.co.jp
  • Booth: 1254


Find your particle counting solutions with RION!

RION Air and Liquid Particle Counting Systems - Booth 1254

0.02um Sensitivity for Chemicals and UPW!

RION Co., Ltd. of Tokyo, Japan is a world-leading producer of Laser Particle Counting systems featuring state-of-the-art noise reduction technology and superior detection efficiency. RION Particle Counting systems are technologically superior and highly reliable, allowing for higher detection efficiency than competitor models. RION Liquid Particle Counters are user-friendly, responsive, and versatile in both batch and inline modes. All systems are equipped with a standard communication interface for computer operation and offer compatible options for all liquids from UPW to strong acids. Other standard equipment, including a built-in printer, memory card reader, LCD touch panel display, integrated Pulse Height Analyzer, and one-button operation all provide the user with unparalleled flexibility. RION also offers a variety of Airborne Particle Counters that fit a wide range of applications.

MGN International is RION's exclusive factory representative in North America.

Come see our latest products at SEMICON West, Booth 1254.

 Products

  • 20nm Liquid-Borne Particle Counter KS-20F
    RION’s innovative modular design on the KS series particle counter enables the system to be configured for both inline/online and batch sampling, giving the user maximum operational flexibility and cost savings....

    • For Chemical HF 0.02μm

    • - Detects particles to 0.02μm
    • - Sapphire flow cell
    • - With abundant options, it can be used for both in-line and off-line measurement

    Optical system Light-scattering method
    Light source Diode-pumped solid-state laser (wavelength: 532nm, rated output 1.5W)
    Materials of parts exposed to sample fluid Sapphire, PFA
    Measurement size range 4 channels (Factory default):≥0.02µm, ≥0.03µm, ≥0.04µm, ≥0.06µm
    Setting range 0.02µm to 0.08µm
    Flow rate 10mL/min
    Maximum particle number concentration 50,000 particles/mL (coincidence loss 10%)
    Power requirements 100 to 240 V AC, 50/60Hz, Approx. 250VA
    Dimensions Approx. 235 (H) x 522 (W) x 340 (D) mm
    Weight Approx. 18kg
  • 30nm Liquid-Borne Particle Counter KS-19F
    RION’s innovative modular design on the KS series particle counter enables the system to be configured for both inline/online and batch sampling, giving the user maximum operational flexibility and cost savings....

    • For Chemical HF 0.03μm

    - Detects particles to 0.03μm

    • - Sapphire flow cell
    • - With abundant options, it can be used for both in-line and off-line measurement

    Optical system Light-scattering method
    Light source Diode-pumped solid-state laser (wavelength: 532nm, rated output 800mW)
    Materials of parts exposed to sample fluid Sapphire, PFA
    Measurement size range 4 channels (Factory default):≥0.03µm, ≥0.06µm, ≥0.1µm, ≥0.13µm
    Setting range 0.03µm to 0.13µm
    Flow rate 10mL/min
    Maximum particle number concentration 40,000 particles/mL (coincidence loss 10%)
    Power requirements DC12V (Supplied by KE-40B1)
    Dimensions Approx. 170 (H) x 487 (W) x 310 (D) mm
    Weight Approx. 13.5kg
  • 70nm Photo-Resist Particle Counter KS-41B
    RION’s innovative modular design on the KS series particle counter enables the system to be configured for both inline/online and batch sampling, giving the user maximum operational flexibility and cost savings....

    • Measures 0.1μm Particles in Photoresist, SOG, and other solutions

    • - Can be connected to the multiple monitoring systems
    • - Optional dynamic range upgrade (0.07-0.5um)
    Optical system Light-scattering method
    Light source Diode-pumped solid-state laser (wavelength: 532nm, rated output 500mW)
    Materials of parts exposed to sample fluid Synthetic quartz, PFA
    Measurement size range 5 channels (Factory default): ≥0.1µm, ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
    Setting range 0.1µm to 0.5µm
    Flow rate 5mL/min
    Maximum particle number concentration 9,600 particles/mL (coincidence loss 10%)
    Power requirements DC12V (Supplied by KE-40B1)
    Dimensions Approx. 164 (H) x 464 (W) x 305 (D) mm (excl. protruding parts)
    Weight Approx. 12.5kg

Categories

203 Inspection & Measurement Products
  • Air Velocity (VA) Humidity and Moisture Sensing
  • Defect; Particle; Contam. Detection/Review/Inspect.
  • Instruments; Bench Top Test
  • Particle Monitors; Analyzers - Airborne or Liquid
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 208 Test Equipment
  • Probe Card Maintenance and Analysis Systems
  • Test Contactor Cleaning; Conditioning Systems
    • 400 Components, Parts & Accessories
  • Sensors
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Chemical; Pure Water; Fluid Handling; Storage; Supply Sys.
  • Chemical; Pure Water; Fluid Monitoring & Control Systems
  • Environmental; Utility Systems & Monitoring
    • 501 HVAC, Temperature, Humidity, Contamination Control
  • Clean Rooms
  • Contamination Control; HEPA Filtering Systems
  • HVAC; Temperature; Humidity Systems and Control
    • 701 Manufacturing Services or Consulting
  • Clean Room; Contamination Control
  • Facilities; Bldg. Environmental Systems; Alt. Energy
    • 804 Professional Services
  • Sales; Manufacturers Representation or Distributors
    • 900 Support Products
  • Analytical Standards; Calibrators
  • Clean Room Supplies; Cleaning Supplies
  • Laboratory Apparatus and Supplies
    • 902 Other
  • Other

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