SEMCO TECHNOLOGIES

25 Rue Didier Daurat
Parc Mermoz
Castelnau-le-Lez,  34170

France
http://semco-tech.com/
  • Booth: 1654


Semco: Your Global Clamping Solutions for Semiconductors

Global Clamping Solutions for Advanced Semiconductor Processing

Semco Engineering, Inc., a subsidiary of Semco Technologies, specializes in Electrostatic Chucks and gas delivery systems. Semco''s Electrostatic Chucks are plug and play and are available in multi polarities, are reworkable, and have an excellent thermal transfer under vacuum. Semco''s patented ESC technology provides long lifetime and high reliability.  Additionally, our ESC''s work in a temperature range from -150°C upto 650°C, and can include embedded heaters up to 550°C. Semco also designs and manufacturers valves, mass flow controllers (MFC''s), and gas panels. 

 Products

  • Electrostatic Chucks
    SEMCO Technologies has been designing and manufacturing innovative electrostatic chucks (ESC) and heating pedestals for the wafer processing industry since 1992....

    • Electrostatic smart clamping solutions for thin and ultra-thin wafers
    Safe and easy handling of semiconductor wafers, flat panel displays, solar cells, and other substrates. Clamping capability of a variety of materials including dielectrics and compounds.

    • Compatible with substrates from 50-mm to 450-mm diameter
    • Wide operating temperature range between -150°C (-238°F) and +650°C (+1200°F)
    • For Si and III-V wafers, compatible with non conductive substrates sus as Sapphire, TSV carriers...
    • Electrode type: Bi-Polar, Multi-Polar
    • Wafer contact surface: custom pattern dedicated to customer's applications

  • Gas Flow Components
    SEMCO Technologies specializes in designing and manufacturing of precision valves, gas panels and gas components used for the semiconductor, PV and nuclear industries....

    • SEMCO Technologies gas components cover a wide range of sizes, pressures and temperatures.

    Through its brands Flowlink, Kemstream and Qualiflow, SEMCO Technologies offers a wide range of gas components, from the simple union to the most complex gas panel. From 1/8" to 1", our products are reliable and suitable for standard applications as well as high temperature or high pressure applications.

    • Gas Panels

    • Valves

    • Vaporizers

      • Kemstream VAPBOX 300: Compact and low cost DLI vaporizer that can operate up to 250°C. It features one high performance and proprietary Kemstream injection head

      • Kemstream VAPBOX 1500: High performance and versatile DLI vaporizer that can operate up to 300°C. It features two proprietary Kemstream injection heads.

    • Gas Accessories

Categories

207 Process Equipment
  • Thermal Processing
    • 308 Substrates
  • Compound Semi substrates (GaAs; GaN; InP; SiGe, etc.)
  • Diamond substrates
  • Gallium Arsenide (GaAs); Sapphire Substrates
  • SOI; Silicon on Sapphire (SOS); Silicon Carbide
  • Strained silicon; Engineered Substrates
  • Thin & Thick film substrates for MEMS
    • 400 Components, Parts & Accessories
  • Chucks for Wafer and other Substrates
  • Flow Control: Valves; Meters; Gauges; Regulators; MFC's
    • 401 Sub-systems
  • Gas; Liquid delivery panels as subsystems
  • Plasma Sources; Controls; Monitoring; Diagnosis
    • 700 Manufacturing Services
  • Etch; Strip; Cleaning Service
  • Repair; Rebuild; Install Equipment; Maintenance Svcs; Spares
    • 701 Manufacturing Services or Consulting
  • Manufacturing Process Support and Development
    • 900 Support Products
  • Laboratory Apparatus and Supplies
    • 902 Other
  • Other

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