​Displacement Measuring Interferometer

ultra-precise sensor for semiconductor applications

The continuous increase of ultra precise motion control in the semiconductor equipment makes the IDS3010 (Interferometric Displacement Sensor) the perfect choice for industrial manufacturers in the industry. attocube’s laser interferometer provides miniaturized sensor heads, suitable for harsh environment with extreme accuracy and resolution down to pico-meter level. This is the outstanding combination for easy integration within semiconductor machines thanks to a broad spectrum of digital and analog real-time interfaces and protocols to deliver simple transmission of position data. 

Fast, precise & powerful

• data capturing rate of 10 MHz
• measurements with target velocities of up to 2 m/s
• working distances up to 5 m
• 1 pm resolution

Compace & robust sensor heads

• smallest diameter 1.2 mm
• pluggable or clamped
• vacuum compatibility up to 5e-11 mbar
• temperatures up to 150°C

Get more info here IDS3010 Displacement Sensor

Ultraprecise Nanopositioners

piezo based nanopositioners for ultra clean environment 

Due to the need of highest accuracy in the semiconductor market, attocube combines its superior precision positioning technology with unrivaled compact and low-particle generating design to fit in any high complex system. Moreover attocube’s nanopositioners offer flexible stacking for motion with multiple degrees of freedom suitable for a wide range of extreme environments.

Extreme environments

attocube‘s nano drives meet the challenge of precise positioning systems, reliably working under extreme environmental conditions. Suitable models are available for high temperature, high and ultra high vacuum.

• UHV pressure down to 5 x 10^-11 mbar
• high temperatures up to 100°C
   

Compact, precise & powerful

attocube‘s positioners employ a powerful and precise nano drive in a compact frame for easy integration into customer setups.

• footprint  from 15 x 15 mm²
• dynamic Force up to 8 N
• resolution down to 1 nm
   

Flexible positioning

attocube‘s positioners can be stacked to multiaxis devices with up to 6 degrees of freedom.

Get more info here: attocube nanopositioners

Dynamic Motion Control of wafer stages

Wafer stages need to perform ever larger and faster movements to increase efficiency and throughput of the production process. Furthermore, single digit nanometer precision is required to ensure dense circuit patterns. These requirements can only be achieved by utilizing ultra precise displacement sensors for closed loop motion control of the stage. Thereby, occurring deviations can be compensated instantly.

However, finding a measurement device which offers real-time position tracking for such demanding movements and can be operated in vacuum & clean room conditions is a challenging task.

attocube´s interferometer sensor IDS3010 enables metrology tools to achieve the required precision at nanometer range over long distances up to 5 meters with a target velocity of up to 2 m/s.

The miniaturized and light weight sensor heads can be integrated directly into the wafer stage. This reduces the moving mass significantly compared to stage attached mirrors. 

Download the Application Note: Closed-Loop XY-Stage Control with Yaw Rotation Tracking