Confidently monitor a broad range of volatile organic compounds (VOCs) with a single instrument.
The Vocus VOC Monitor provides sensitive and simultaneous measurements for a large variety of VOCs, instantaneously, reported in real time.
Features
- Fast, real-time monitoring of dynamic processes or high-throughput screening
- Highly sensitive quantification for a wide range of VOCs
- pptV limits of detection
- High resolution to ensure accurate compound identification
- Mobile, point-of-interest measurements, or multi-port valve connectivity, requiring no sample preparation
Typical AMC monitoring can be done with PTR reagent ions, however, for other critical AMCs, reagent ion switching can be used to expand compound coverage. The Vocus VOC Monitor samples ambient air in a fab environment to observe potential AMC risk. The example below demonstrates reagent ion switching a minute intervals.
Enhancement of the measurement shows the reagent ions used in second intervals. Gray represents NH4+ ionization and yellow represents O2+ ionization.
Limits of Detection
System Specifications